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Ball Bearing ILS Type

Ball Bearing ILS Type
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Positioning stage unit for clean room

· Positioning stage ILS Series .
· Stage unit that simply positions the glass substrate conveyor use cassette in the buffer section in each process.
· Global adoption is expanding worldwide including large type compatible with G7 & G8 class and compact type supporting improvement of conventional production lines.
· Can slide and move in all directions ILS The stage unit can receive heavy loads despite being compact, and compared with conventional machines employing ball bearings, the cassette can be positioned with a very smooth movement.
· After completion of positioning, AGV in the no-load state after delivery of the cassette, the movable part always returns to the origin, and waits for the next cassette.
· In addition, the S type that can hold movable part also available.

Part Number

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Part Number
Part NumberStandard Unit PriceVolume DiscountShipping Days?RoHSLength L

276.69 €

Available 6 Days 1042.5

421.64 €

Available 6 Days 1052.5


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Basic information

Type Standard Shape Flange Withstand Operating Load Range(N) 500.1~5000
Working Load(N) 1470 Body Material Aluminum Main Ball material Steel
O.D. D(Ø) 140 Application Positioning Stage for Clean Room

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