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Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
(i)Remark
- ■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Part Number
Once your search is narrowed to one product,
the corresponding part number is displayed here.
Part Number
|
|---|
| XLD-25L-M9// |
| XLD-40 |
| XLD-40L-M9// |
| Part Number |
Standard Unit Price
| Minimum order quantity | Volume Discount | Flange Calls | Sonic Conductance | Pilot Port Direction | Switch Part Number | |
|---|---|---|---|---|---|---|---|---|
884.79 € | 1 | 26 Days | 25 | 14L/S | Flange surface, back | No auto-switch (with built-in magnet) | ||
1,283.57 € | 1 | 39 Days | 40 | 45L/S | Flange side | No auto-switch (no built-in magnet) | ||
1,060.13 € | 1 | 39 Days | 40 | 45L/S | Flange surface, back | No auto-switch (with built-in magnet) |
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Basic information
| Type | Vacuum operation vacuum valves | Application | Single Item Operating | Installation method | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-port valve | Switching Type | 2-position Normally Closed | Pipe Port Type | Flange |
| Flange Type | KF | Seal Type | Bellows seal | Temperature Range(°C) | 5 to 60 |
| Number of Switches | No switch | Seal material | FKM 1349-80 | Amount of leakage(Pa·m3/s) | Internal: 1.3 × 10-10, External: 1.3 × 10-11 |
| Body Surface Treatment | External: hard anodized aluminum, Internal: base material | Seal Change Location | None | Heater Yes/No | None |
Configure
Basic Attributes
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Flange Calls
- 25
- 40
-
Sonic Conductance
-
Pilot Port Direction
- Flange side
- Flange surface, back
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Switch Part Number
-
Type
- XLD
-
Filter by CAD data type
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Filter by standard shipping days
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- 26 Days or Less
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Optional Attributes
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
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