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Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

SMC

SMC

A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

(i)Remark

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Data sheet

Part Number

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Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series Specifications

Angle valve XMD Series external appearance

Angle valve XMD Series external appearance

Angle valve XMD series pilot port direction

Angle valve XMD series pilot port direction

In-line type XYD series external appearance

In-line type XYD series external appearance

In-line type XYD series pilot port direction

In-line type XYD series pilot port direction

ModelXMD-25
XYD-25		XMD-40
XYD-40		XMD-50
XYD-50		XMD-63
XYD-63		XMD-80
XYD-80
Flange (Valve) Size2540, CF0705063, CF11480
Valve TypeNormally closed (pressurize to open and spring seal) (both main and initial exhaust valves)
FluidsInert gas under vacuum
Operating Temperature (°C)5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)1 × 10-6 up to atmospheric pressure
Conductance L/s Note 1Main Exhaust Valve144580160200
Initial Exhaust Valve0.5 to 32 to 82.5 to 114 to 184 to 18
Leakage Pa·m3/sInternalFor standard material (FKM): 1.3 × 10-10, values at ambient temperature and excluding gas permeation
ExternalFor standard material (FKM): 1.3 × 10-11, values at ambient temperature and excluding gas permeation
Operating Time (s)Main Exhaust Valve0.100.210.240.260.28
Initial Exhaust Valve0.700.080.090.230.27
Flange TypeKF (NW)KF (NW), CFKF (NW)KF (NW), K (DN), CFKF (NW), K (DN)
Principal Material Note 3Main body: SCS13 (Stainless steel 304 equivalent), Bellows: Stainless steel 316L,
Bellows holder: Stainless steel 304, FKM (standard seal material)
Pilot Pressure MPa (G)0.4 to 0.7 (both main and initial exhaust valves)
Pilot Port SizeM5Rc 1/8 
Weight kg Note 2XMD0.651.50 (1.86)2.204.10 (5.46)6.80
XYD0.711.522.604.808.30

Note 1: The main exhaust valve conductance is the value for the “molecular flow” of an elbow with the same dimensions. The initial exhaust valve conductance is the “viscous flow” value.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.

Product Drawing

 

(Unit: mm)

 

XMD angle type dimensional drawing

XMD angle type dimensional drawing

XYD in-line type dimensional drawing

XYD in-line type dimensional drawing

ModelABCDFnFdFcGHJKP.C.D. L1L2
XMD-255012348140--2641167.5--
XMD-406517066255-7041632015P.C.D 58.76 × ø6.6 mm
XMD-507018379275--52682017.5--
XMD-63882171003879511470722019.5P.C.D 92.18 × ø8.4 mm
XMD-80902561173114110-83982026.5--
ModelABCDEFnFdGHJK
XYD-25100.286.748123.540-2666167.5
XYD-401301146623855-41842015
XYD-501781287925375-52952017.5
XYD-632091631003618795701212019.5
XYD-80268193117380114110831442026.5

Product Diagram

XMD angle type diagram

XMD angle type diagram

XYD in-line type diagram

XYD in-line type diagram

*Refer to p. 497 of the manufacturer's catalog for maintenance parts.

Product Working Principle

  • 1. Initial exhaust valve opening adjustment
    Adjust the initial exhaust rate before use without applying pilot pressure to pilot port S. Set the initial exhaust rate to zero by turning the adjustment nut clockwise until it stops. (Do not use tools.) Adjust the initial exhaust rate by turning the adjustment nut counterclockwise. See figure to the right for the relationship between the number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance.
  • 2. Opening of the initial exhaust valve (valve S)
    When pilot pressure is applied to pilot port S, valve S separates from the valve S seal assembly and opens by the adjusted amount.
  • 3. Opening of the main exhaust valve (valve M)
    When pilot pressure is applied to pilot port M, the M valve separates from the body seat section and opens fully.
  • 4. Closing of the initial and main exhaust valves
    Remove the pilot pressure from pilot port S and pilot port M to return the S and M valves to their previous positions and seal them.
Graph showing number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance

Graph showing number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance

Notes

  • *The body material is SCS13 (Stainless steel 304 equivalent), the bellows material is Stainless steel 316L and the metal material used for other vacuum parts is Stainless steel 304. The standard seal material for vacuum parts is FKM, but it can be changed for other materials (see section on part number notation). Check that the fluid in use will not damage the selected material.
  • *Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
  • *The temperature of the switch part must be no higher than 60°C.
  • *Refer to the manufacturer's catalog for product information not detailed above.
Data to be displayed
30
45
60
  1. 1
Part Number
XMD-25-XN1A
XMD-40-XN1A
XMD-40-XR1A
XMD-40CL-A93LA-XS1B
XMD-40H0-XN1A
XMD-40L-M9//-XQ1A
XMD-40M-XQ1A
XMD-50-XN1A
XMD-50H0-XN1A
XMD-50H0-XR1A
XMD-50LH0-XQ1A
XYD-25H0-XN1A
XYD-50H0-XN1A
Part Number
Standard Unit Price
Minimum order quantityVolume Discount
Standard
Shipping Days
?
Flange Type Flange Calls Sonic Conductance Valve Type Pilot Port Direction Temperature Range
(°C) 		Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s) 		Seal Change Location Length of Lead Wire for Switch
(m)

931.04 €

1 26 Days KF2514L/SAngle typeFlange side5 to 60No auto-switch (no built-in magnet)No switchEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal / S valve seal assembly / O-ring for fixing-

1,311.81 €

1 26 Days KF4045L/SAngle typeFlange side5 to 60No auto-switch (no built-in magnet)No switchEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal / S valve seal assembly / O-ring for fixing-

2,006.16 €

1 26 Days KF4045L/SAngle typeFlange side5 to 60No auto-switch (no built-in magnet)No switchChemraz SS592Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal / S valve seal assembly / O-ring for fixing-

1,432.69 €

1 26 Days CF4045L/SAngle typeFlange surface, back5 to 60D-A93 reed auto switch2 pcs. valve open/closedVMQ 1232-70Internal: 1.3 × 10-8, External: 1.3 × 10-11Valve seal / S valve seal assembly / O-ring for fixing3

1,327.61 €

1 26 Days KF4045L/SAngle typeFlange side5 to 150No auto-switch (no built-in magnet)No switchEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal / S valve seal assembly / O-ring for fixing-

1,614.27 €

1 26 Days KF4045L/SAngle typeFlange surface, back5 to 60No auto-switch (with built-in magnet)No switchKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal / S valve seal assembly / O-ring for fixing-

1,639.34 €

1 26 Days KF4045L/SAngle typeFlange surface, right5 to 60No auto-switch (no built-in magnet)No switchKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal / S valve seal assembly / O-ring for fixing-

1,522.30 €

1 26 Days KF5080L/SAngle typeFlange side5 to 60No auto-switch (no built-in magnet)No switchEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal / S valve seal assembly / O-ring for fixing-

1,542.81 €

1 26 Days KF5080L/SAngle typeFlange side5 to 150No auto-switch (no built-in magnet)No switchEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal / S valve seal assembly / O-ring for fixing-

2,495.83 €

1 26 Days KF5080L/SAngle typeFlange side5 to 150No auto-switch (no built-in magnet)No switchChemraz SS592Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal / S valve seal assembly / O-ring for fixing-

2,000.46 €

1 26 Days KF5080L/SAngle typeFlange surface, back5 to 150No auto-switch (no built-in magnet)No switchKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal / S valve seal assembly / O-ring for fixing-

819.61 €

1 Quote KF2514L/SIn-line typeFlange surface, back5 to 150No auto-switch (no built-in magnet)No switchEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal / S valve seal assembly / O-ring for fixing-

1,303.53 €

1 Quote KF5080L/SIn-line typeFlange surface, back5 to 150No auto-switch (no built-in magnet)No switchEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal / S valve seal assembly / O-ring for fixing-

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  1. 1
 

Basic information

Type Pilot Vacuum Valve Application Single Item Operating Installation method Direct
Number of Ports 2-port valve Switching Type 2-position Normally Closed Pipe Port Type Flange
Seal Type Bellows seal

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Basic Attributes

  • Flange Type

    • KF
    • CF

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  • Flange Calls

    • 25
    • 40
    • 50

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  • Sonic Conductance

    • 14L/S
    • 45L/S
    • 80L/S

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  • Valve Type

    • Angle type
    • In-line type

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  • Pilot Port Direction

    • Flange side
    • Flange surface, back
    • Flange surface, right

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  • Temperature Range(°C)

    • 5 to 60
    • 5 to 150

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  • Switch Part Number

    • D-A93 reed auto switch
    • No auto-switch (no built-in magnet)
    • No auto-switch (with built-in magnet)

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  • Number of Switches

    • 2 pcs. valve open/closed
    • No switch

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  • Seal material

    • Chemraz SS592
    • VMQ 1232-70
    • EPDM 2101-80
    • Kalrez 4079

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  • Amount of leakage(Pa·m3/s)

    • Internal: 1.3 × 10-8, External: 1.3 × 10-11
    • Internal: 1.3 × 10-8, External: 1.3 × 10-9

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  • Seal Change Location

    • Valve seal / S valve seal assembly / O-ring for fixing
    • Valve seal / external seal / S valve seal assembly / O-ring for fixing

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  • Length of Lead Wire for Switch(m)

    • 3

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  • Type

    • XMD
    • XYD

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  • Filter by CAD data type

    • 2D
    • 3D

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    • 26 Days or Less

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