Vacuum Valves（Type：Pilot Vacuum Valve）
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Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD
SMC
A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.- 2D / 3D CAD data available
› Configure nowStarting from∗ ： 819.61 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)- 2D / 3D CAD data available
› Configure nowStarting from∗ ： 653.97 € Min. Shipping Days ： 20 Days *Unit price with basic configuration
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Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)- 2D / 3D CAD data available
› Configure nowStarting from∗ ： 462.87 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)- 2D / 3D CAD data available
› Configure nowStarting from∗ ： 472.09 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series
SMC
Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.- 2D / 3D CAD data available
› Configure nowStarting from∗ ： 626.70 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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| Type |
| Application |
| Installation method |
| Number of Ports |
| Types of solenoid |
| Switching Type |
| Electromagnetic valve drive type |
| Effective Sectional Area(mm2) |
| Pipe Port Type |
| Nominal Pipe Thread Size |
| Connection tube diameter |
| Flange Type |
| Flange Calls |
| Cv Value |
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| Brand | SMC | SMC | SMC | SMC | SMC |
| Product Series | Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series | Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series | Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series | ||
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| Starting from∗ | 819.61 € *Unit price with basic configuration | 653.97 € *Unit price with basic configuration | 462.87 € *Unit price with basic configuration | 472.09 € *Unit price with basic configuration | 626.70 € *Unit price with basic configuration |
| Min. Shipping Days | 26 Days | 20 Days | 26 Days | 26 Days | 26 Days |
| Type | Pilot Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve |
| Application | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating |
| Installation method | Direct | Direct | Direct | Direct | Direct |
| Number of Ports | 2-port valve | 2-port valve | 2-port valve | 2-port valve | 2-port valve |
| Types of solenoid | - | - | - | - | - |
| Switching Type | 2-position Normally Closed | 2-position Normally Closed | 2-position Normally Closed | 2-position Normally Closed | 2-position Normally Closed |
| Electromagnetic valve drive type | - | - | - | - | - |
| Effective Sectional Area(mm2) | - | - | - | - | - |
| Pipe Port Type | Flange | Flange | Flange | Flange | Flange |
| Nominal Pipe Thread Size | - | - | - | - | - |
| Connection tube diameter | - | - | - | - | - |
| Flange Type | KF / K / CF | KF | KF | KF | KF |
| Flange Calls | 25 / 40 / 50 / 63 | 40 | 16 | 25 | 25 |
| Cv Value | - | - | - | - | - |
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Application
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Installation method
- Direct
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Number of Ports
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Types of solenoid
- Single
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Switching Type
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Electromagnetic valve drive type
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Effective Sectional Area(mm2)
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Pipe Port Type
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Nominal Pipe Thread Size
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Connection tube diameter
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Flange Type
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Flange Calls
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Cv Value
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