Part number:
possible part numbers found.Part number |
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Unit price (excluding VAT)(Unit price including VAT) | Standard shipping days |
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884.79 € ( 1,052.90 € ) | 26 working days |
1,283.57 € ( 1,527.45 € ) | 22 working days |
1,060.13 € ( 1,261.55 € ) | 22 working days |
A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.