Configure

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

Part number:

Still undefined. 3 possible part numbers found.
Quantity:

Part number list

Number of items

Flange Calls

Sonic Conductance

Pilot Port Direction

Switch Part Number

Minimum order quantity
25
14L/S
Flange surface, back
No auto-switch (with built-in magnet)
1 pieces
40
45L/S
Flange side
No auto-switch (no built-in magnet)
1 pieces
40
45L/S
Flange surface, back
No auto-switch (with built-in magnet)
1 pieces
Unit price (excluding VAT)(Unit price including VAT)
Standard shipping days
884.79 €
( 1,052.90 € )
26 working days
1,283.57 €
( 1,527.45 € )
22 working days
1,060.13 €
( 1,261.55 € )
22 working days

More Information

Basic information

A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

Caution

  • Product images may be representative images only. Please refer to the manufacturer's catalog for shape details.