XLH, High Vacuum Manual Angle Valve, Bellows Seal
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
(i)Remark
- ■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Part Number
Once your search is narrowed to one product,
the corresponding part number is displayed here.
Part Number
|
|---|
| XLH-16 |
| XLH-25 |
| XLH-25-XN1A |
| Part Number |
Standard Unit Price
| Minimum order quantity | Volume Discount | Flange Calls | Sonic Conductance | Seal material | Amount of leakage (Pa·m3/s) | Seal Change Location | |
|---|---|---|---|---|---|---|---|---|---|
440.59 € | 1 | 4 Days | 16 | 5L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | ||
458.96 € | 1 | 4 Days | 25 | 14L/S | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | ||
460.73 € | 1 | 26 Days | 25 | 14L/S | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal |
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Basic information
| Type | Manual vacuum valve | Application | Single Item Operating | Installation method | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-port valve | Switching Type | 2-position Normally Closed | Pipe Port Type | Flange |
| Flange Type | KF | Seal Type | Bellows seal | Body Surface Treatment | External: hard anodized aluminum, Internal: base material |
| Heater Yes/No | None |
Configure
Basic Attributes
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Flange Calls
- 16
- 25
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Sonic Conductance
-
Seal material
-
Amount of leakage(Pa·m3/s)
- Internal: 1.3 × 10-10, External: 1.3 × 10-11
- Internal: 1.3 × 10-8, External: 1.3 × 10-9
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Seal Change Location
-
Type
- XLH
-
Filter by CAD data type
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Filter by standard shipping days
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- All
- 4 Days or Less
- 26 Days or Less
Optional Attributes
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
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