SMC Single Axis Robots

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Main Body, Peripheral Components
Type
Stroke(mm)
Max. Transportable Mass Range (Horizontal)(kg)
Max. Transportable Mass (Horizontal)(kg)
Max. Transportable Mass Range (Vertical)(kg)
Max. Transportable Mass (Vertical)(kg)
Drive Method
Guide
Lead(mm)
Input Power Supply
Position Detection
I/O Module
Table Width W1(mm)
Brake
Max. Thrust Force Range(N)
Max. Thrust Force(N)
Noise Filters
Table Length L1(mm)
Usage Environment
Positioning Repeatability(µm)
Maximum Velocity(mm/sec)

    Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

      Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

        Controller (Step Data Input Type) LECP6 (Step Motor) / LECA6 (Servo Motor) Series

          Electric actuator rod type motorless specification LEY series

            Step motor controller JXCE1, 91, P1, D1, L1 series

              Step motor driver LECPA series

                Electric actuator rod type LEY series AC servo motor LECS□

                  Electric slide table high rigidity type LESH series

                    Programless controller LECP1 series

                    • Promotional pricing

                    Electric Slide Table, Compact Type LES Series

                      Electric actuator rod type with guide motorless specification LEYG series

                        Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                          Electric actuator slider type belt drive motorless specification LEFB series

                            Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                              Electric actuator support guide ball screw drive LEFG series

                                Electric Actuator Slider Type Belt Drive LEFB Series Step Motor/Servo Motor

                                • Promotional pricing

                                Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

                                  Electric cylinder LZB series

                                    Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                                      Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                                        Electric actuator rod type dust-proof and drip-proof specification LEY series AC servo motor LECS□

                                          Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                                            3-axis step motor controller JXC92 series

                                              Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                                                Electric actuator miniature rod type LEPY series step motor (Servo 24 V DC)

                                                  AC Servo Motor Driver, Incremental Type, LECSA Series / Absolute Type

                                                    Gateway unit LEC-G series

                                                      Programless controller LECP2 series with stroke learning function

                                                        Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                                          Electric Actuator Miniature Slide Table Type LEPS Series Step Motor

                                                            AC servo motor driver absolute type LECYM / LECYU series

                                                              Card motor LAT3 series

                                                                4-axis step motor controller JXC73 / 83/93 series

                                                                  Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                                                    Electric Actuator Guide Rod Slider Belt Drive LEL Series Step Motor

                                                                      Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

                                                                        Electric Actuator, Low Profile Slider Type, Linear Guide 1-Axis/2-Axis, LEMH/LEMHT Series

                                                                          Electric actuator rod type LEY series AC servo motor LECY□

                                                                            Electric cylinder LZC series

                                                                              Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                                                                                Electric actuator support guide belt drive LEFG series

                                                                                  Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                                                    Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                                                                                      Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series

                                                                                        Electric actuator guided rod type LEYG series AC servo motor LECS□

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                                                                                        Product Series

                                                                                        Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

                                                                                        Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

                                                                                        Controller (Step Data Input Type) LECP6 (Step Motor) / LECA6 (Servo Motor) Series

                                                                                        Electric actuator rod type motorless specification LEY series

                                                                                        Step motor controller JXCE1, 91, P1, D1, L1 series

                                                                                        Step motor driver LECPA series

                                                                                        Electric actuator rod type LEY series AC servo motor LECS□

                                                                                        Electric slide table high rigidity type LESH series

                                                                                        Programless controller LECP1 series

                                                                                        Electric Slide Table, Compact Type LES Series

                                                                                        Electric actuator rod type with guide motorless specification LEYG series

                                                                                        Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                                                                                        Electric actuator slider type belt drive motorless specification LEFB series

                                                                                        Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                                                                                        Electric actuator support guide ball screw drive LEFG series

                                                                                        Electric Actuator Slider Type Belt Drive LEFB Series Step Motor/Servo Motor

                                                                                        Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

                                                                                        Electric cylinder LZB series

                                                                                        Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                                                                                        Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                                                                                        Electric actuator rod type dust-proof and drip-proof specification LEY series AC servo motor LECS□

                                                                                        Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                                                                                        3-axis step motor controller JXC92 series

                                                                                        Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                                                                                        Electric actuator miniature rod type LEPY series step motor (Servo 24 V DC)

                                                                                        AC Servo Motor Driver, Incremental Type, LECSA Series / Absolute Type

                                                                                        Gateway unit LEC-G series

                                                                                        Programless controller LECP2 series with stroke learning function

                                                                                        Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                                                                        Electric Actuator Miniature Slide Table Type LEPS Series Step Motor

                                                                                        AC servo motor driver absolute type LECYM / LECYU series

                                                                                        Card motor LAT3 series

                                                                                        4-axis step motor controller JXC73 / 83/93 series

                                                                                        Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                                                                        Electric Actuator Guide Rod Slider Belt Drive LEL Series Step Motor

                                                                                        Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

                                                                                        Electric Actuator, Low Profile Slider Type, Linear Guide 1-Axis/2-Axis, LEMH/LEMHT Series

                                                                                        Electric actuator rod type LEY series AC servo motor LECY□

                                                                                        Electric cylinder LZC series

                                                                                        Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                                                                                        Electric actuator support guide belt drive LEFG series

                                                                                        Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                                                        Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                                                                                        Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series

                                                                                        Electric actuator guided rod type LEYG series AC servo motor LECS□

                                                                                        CAD
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                                                                                        Starting from

                                                                                        595.53 €

                                                                                        *Unit price with basic configuration

                                                                                        988.33 €

                                                                                        *Unit price with basic configuration

                                                                                        7.27 €

                                                                                        *Unit price with basic configuration

                                                                                        475.09 €

                                                                                        *Unit price with basic configuration

                                                                                        5.19 €

                                                                                        *Unit price with basic configuration

                                                                                        5.73 €

                                                                                        *Unit price with basic configuration

                                                                                        1,000.57 €

                                                                                        *Unit price with basic configuration

                                                                                        695.53 €

                                                                                        *Unit price with basic configuration

                                                                                        16.49 €

                                                                                        *Unit price with basic configuration

                                                                                        627.53 €

                                                                                        Special price

                                                                                        *Unit price with basic configuration

                                                                                        Promotional pricing

                                                                                        97.34 €

                                                                                        *Unit price with basic configuration

                                                                                        1,128.06 €

                                                                                        *Unit price with basic configuration

                                                                                        138.39 €

                                                                                        *Unit price with basic configuration

                                                                                        1,432.34 €

                                                                                        *Unit price with basic configuration

                                                                                        315.13 €

                                                                                        *Unit price with basic configuration

                                                                                        924.41 €

                                                                                        *Unit price with basic configuration

                                                                                        127.39 €

                                                                                        Special price

                                                                                        *Unit price with basic configuration

                                                                                        Promotional pricing

                                                                                        278.34 €

                                                                                        *Unit price with basic configuration

                                                                                        2,232.19 €

                                                                                        *Unit price with basic configuration

                                                                                        1,348.27 €

                                                                                        *Unit price with basic configuration

                                                                                        1,878.61 €

                                                                                        *Unit price with basic configuration

                                                                                        24.21 €

                                                                                        *Unit price with basic configuration

                                                                                        1,682.18 €

                                                                                        *Unit price with basic configuration

                                                                                        37.09 €

                                                                                        *Unit price with basic configuration

                                                                                        493.87 €

                                                                                        *Unit price with basic configuration

                                                                                        83.24 €

                                                                                        *Unit price with basic configuration

                                                                                        15.61 €

                                                                                        *Unit price with basic configuration

                                                                                        343.51 €

                                                                                        *Unit price with basic configuration

                                                                                        2,562.24 €

                                                                                        *Unit price with basic configuration

                                                                                        598.76 €

                                                                                        *Unit price with basic configuration

                                                                                        17.32 €

                                                                                        *Unit price with basic configuration

                                                                                        13.87 €

                                                                                        *Unit price with basic configuration

                                                                                        12.15 €

                                                                                        *Unit price with basic configuration

                                                                                        1,995.80 €

                                                                                        *Unit price with basic configuration

                                                                                        520.43 €

                                                                                        *Unit price with basic configuration

                                                                                        1,094.31 €

                                                                                        *Unit price with basic configuration

                                                                                        1,319.73 €

                                                                                        *Unit price with basic configuration

                                                                                        1,173.60 €

                                                                                        *Unit price with basic configuration

                                                                                        380.90 €

                                                                                        *Unit price with basic configuration

                                                                                        1,209.41 €

                                                                                        *Unit price with basic configuration

                                                                                        383.87 €

                                                                                        *Unit price with basic configuration

                                                                                        2,740.10 €

                                                                                        *Unit price with basic configuration

                                                                                        679.23 €

                                                                                        *Unit price with basic configuration

                                                                                        1,065.37 €

                                                                                        *Unit price with basic configuration

                                                                                        1,213.06 €

                                                                                        *Unit price with basic configuration

                                                                                        Min. Shipping Days : 7 Days 4 Days 4 Days 9 Days 4 Days 12 Days 26 Days 8 Days 9 Days Same day 7 Days 26 Days 26 Days 26 Days 7 Days 4 Days Same day 4 Days 26 Days 26 Days 26 Days 7 Days 26 Days 26 Days 15 Days 4 Days 4 Days 26 Days 26 Days 15 Days 26 Days 17 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days
                                                                                        Main Body, Peripheral ComponentsMain BodyMain BodyPeripheral ComponentsMain BodyPeripheral ComponentsPeripheral ComponentsMain BodyMain BodyPeripheral ComponentsMain BodyMain Body / Peripheral ComponentsMain BodyMain Body / Peripheral ComponentsMain BodyPeripheral ComponentsMain BodyMain Body / Peripheral ComponentsMain BodyMain BodyMain BodyMain BodyMain Body / Peripheral ComponentsPeripheral ComponentsMain Body / Peripheral ComponentsMain BodyPeripheral ComponentsPeripheral ComponentsPeripheral ComponentsMain BodyMain BodyPeripheral ComponentsMain Body / Peripheral ComponentsPeripheral ComponentsMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyPeripheral ComponentsMain BodyMain BodyMain BodyMain Body
                                                                                        TypeRodsSliders-Rods--RodsSliders-SlidersRodsRodsSlidersSliders-SlidersSlidersRodsSlidersSlidersRodsRods-SlidersRods---SlidersSliders-Sliders-SlidersSlidersSlidersSlidersRodsRodsSliders-SlidersSlidersRodsRods
                                                                                        Stroke(mm)30 ~ 5001,000 ~ 950-30 ~ 800--30 ~ 50050 ~ 150-30 ~ 15030 ~ 30030 ~ 5001,000 ~ 30001,000 ~ 950-1,000 ~ 9001,000 ~ 95010 ~ 2001,000 ~ 30001,000 ~ 90050 ~ 80030 ~ 300-1,000 ~ 90025 ~ 75---1,000 ~ 90025 ~ 50-10 ~ 50-1,000 ~ 30001,000 ~ 9001,000 ~ 17001,000 ~ 140030 ~ 80025 ~ 2001,000 ~ 3000-1,000 ~ 9001,000 ~ 170030 ~ 50030 ~ 300
                                                                                        Max. Transportable Mass Range (Horizontal)(kg)2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0-10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 150.1 or Higher--10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0-0 to 2.0 / 2.1 to 5.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.02.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0-0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.020.1 to 50.0 / 50.1 to 100.0 / 150.1 or Higher2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0-10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0---10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.00 to 2.0-0 to 2.0-2.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.02.1 to 5.05.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 150.1 or Higher2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.02.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.0-10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0
                                                                                        Max. Transportable Mass (Horizontal)(kg)3 ~ 905 ~ 65-18 ~ 200--18 ~ 601 ~ 12-1 ~ 518 ~ 6018 ~ 605 ~ 2510 ~ 60-1 ~ 1910 ~ 602.4 ~ 2010 ~ 3020 ~ 6040 ~ 2003 ~ 90-15 ~ 851 ~ 6---15 ~ 850.75 ~ 2-1-5 ~ 253 ~ 510 ~ 2010 ~ 2018 ~ 2002.4 ~ 205 ~ 25-15 ~ 856 ~ 117 ~ 8018 ~ 60
                                                                                        Max. Transportable Mass Range (Vertical)(kg)0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0-5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 100.1 or Higher--5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.00 to 2.0 / 2.1 to 5.0-0 to 2.0 / 2.1 to 5.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0-2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0--2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0--5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 100.1 or Higher0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0-2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.00 to 2.0---2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.00 to 2.0-0 to 2.0-----5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 100.1 or Higher---2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0-0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0
                                                                                        Max. Transportable Mass (Vertical)(kg)2 ~ 530.5 ~ 23-8 ~ 115--8 ~ 460.25 ~ 4-0.25 ~ 57 ~ 448 ~ 46-4 ~ 30--4 ~ 30--8 ~ 3019 ~ 1151.5 ~ 51-3 ~ 200.25 ~ 1.5---3 ~ 200.25 ~ 1.5-0.05 ~ Not vertical-----8 ~ 115---3 ~ 20-2 ~ 427 ~ 44
                                                                                        Drive MethodRolled Ball ScrewRolled Ball Screw-Rolled Ball Screw--Rolled Ball ScrewSlide Screws-Slide ScrewsRolled Ball ScrewRolled Ball ScrewBeltsRolled Ball Screw-BeltsRolled Ball ScrewSlide ScrewsBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball Screw-Rolled Ball ScrewSlide Screws---Rolled Ball ScrewRolled Ball Screw-Linear Motor-BeltsBeltsBeltsBeltsRolled Ball ScrewRolled Ball ScrewBelts-Rolled Ball ScrewBeltsRolled Ball ScrewRolled Ball Screw
                                                                                        GuideNot ProvidedProvided-Provided--Not ProvidedProvided-ProvidedProvidedNot ProvidedProvidedProvided-ProvidedProvidedNot ProvidedProvidedProvidedNot ProvidedProvided-ProvidedProvided---ProvidedProvided-Provided-ProvidedProvidedProvidedProvidedNot ProvidedNot ProvidedProvided-ProvidedProvidedNot ProvidedProvided
                                                                                        Lead(mm)2.5 ~ 165 ~ 30-2.86 ~ 20--3 ~ 204 ~ 16-4 ~ 163 ~ 203 ~ 2054 equivalent6 ~ 30-48 ~ Equivalent to 486 ~ 302 ~ 1227 ~ 426 ~ 202.86 ~ 202.5 ~ 16-8 ~ 304 ~ 10---8 ~ 304 ~ 10---54 equivalentEquivalent to 48Equivalent to 48Equivalent to 482.86 ~ 202 ~ 1254 equivalent-8 ~ 30Equivalent to 483 ~ 163 ~ 20
                                                                                        Input Power Supply24 V DC24 V DC24 V DC----24 V DC-24 V DC-----24 V DC-24 V DC---24 V DC--24 V DCSingle-Phase, 100 to 120 V AC ~ Single-Phase, 200 to 230 V AC---24 V DCThree-Phase, 200 to 230 V AC24 V DC--24 V DC24 V DC24 V DC-24 V DC---24 V DC24 V DC-
                                                                                        Position DetectionIncrementalIncrementalIncremental---Incremental / AbsoluteIncremental-Incremental-Incremental / Absolute-Incremental / Absolute-IncrementalIncremental-Incremental / AbsoluteIncremental / AbsoluteIncremental / AbsoluteIncremental--IncrementalIncremental / Absolute--Incremental / AbsoluteIncremental-Incremental-AbsoluteIncrementalIncrementalIncrementalAbsolute-Incremental / Absolute-AbsoluteIncrementalIncrementalIncremental / Absolute
                                                                                        I/O ModuleNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINETNPN / PNP-DeviceNet / Ethernet / EtherCAT / IO-Link / PROFINETNPN / PNP-NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINETNPN / PNPNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET-----NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET-NPN / PNP / Not Provided---NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / PROFINETEthernet-NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET--NPN / PNP-NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET-NPN / PNP / Not Provided--NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / Ethernet / Not Provided / PROFINETNPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET-NPN / PNP / Not Provided---NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETPNP / DeviceNet / Ethernet / Not Provided / PROFINET-
                                                                                        Table Width W1(mm)-39.4 ~ 74-----32 ~ 61-32.2 ~ 60--50 ~ 7450 ~ 74-39.4 ~ 6050 ~ 74-105 ~ 12950 ~ 74---105 ~ 129----105 ~ 12919 ~ 24-49-50 ~ 745672.4 ~ 108.750.4 ~ 124.7--50 ~ 74-105 ~ 12961--
                                                                                        BrakeNot Provided / ProvidedNot Provided / Provided-Not Provided--Not Provided / ProvidedNot Provided / Provided-Not Provided / ProvidedNot ProvidedNot Provided / ProvidedNot ProvidedNot Provided / Provided-Not Provided / ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / Provided-Not ProvidedNot Provided---Not Provided / ProvidedNot Provided-Not Provided-Not Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / Provided-Not Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / Provided
                                                                                        Max. Thrust Force Range(N)0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000-101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More--101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200-0 to 100 / 101 to 200101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 3000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000--0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 2000 to 100 / 101 to 200 / 201 to 300101 to 200 / 301 to 500 / 501 to 1000501 to 1000 / 1,001 or More0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More-101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100---101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100-0 to 100-0 to 100 / 101 to 200 / 201 to 3000 to 1000 to 100 / 101 to 2000 to 100 / 101 to 200101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More0 to 100 / 101 to 2000 to 100 / 101 to 200 / 201 to 300-101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 2000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000
                                                                                        Max. Thrust Force(N)30 ~ 105849 ~ 637-131 ~ 3343--131 ~ 7367.5 ~ 180-7.5 ~ 180131 ~ 736131 ~ 73649 ~ 24598 ~ 588--98 ~ 58824 ~ 19698 ~ 294196 ~ 588521 ~ 334330 ~ 1058-147 ~ 83310 ~ 50---147 ~ 83310 ~ 50-2.5 ~ 6-49 ~ 24529.4 ~ 4998 ~ 19698 ~ 196131 ~ 334324 ~ 19649 ~ 245-147 ~ 83358.8 ~ 107.835 ~ 707131 ~ 736
                                                                                        Noise FiltersNot ProvidedNot Provided / Provided-Not Provided--Not ProvidedNot Provided-Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided-Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided-Not ProvidedNot Provided---Not ProvidedNot Provided-Not Provided-Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided-Not ProvidedNot ProvidedNot ProvidedNot Provided
                                                                                        Table Length L1(mm)-72 ~ 170-----111 ~ 285-88.5 ~ 316.5--102 ~ 170102 ~ 170-72 ~ 122102 ~ 170-160 ~ 172102 ~ 170---160 ~ 172----160 ~ 17276.4 ~ 113.2-60 ~ 150-102 ~ 17064 ~ 8270 ~ 10070 ~ 100--102 ~ 170-160 ~ 17278--
                                                                                        Usage EnvironmentStandardStandard-Dust Resistant--StandardStandard / Dust Resistant-Standard / Dust ResistantStandardDust ResistantStandardStandard-StandardStandardStandardStandardStandardDust ResistantStandard-StandardStandard---StandardStandard-Standard-StandardStandardStandardStandardDust ResistantStandardStandard-StandardStandardStandard / Dust ResistantStandard
                                                                                        Positioning Repeatability(µm)±20±15 ~ ±20-±10 ~ ±20--±10 ~ ±20±50-±50±10 ~ ±20±20±60±10 ~ ±20-±80±10 ~ ±20-±40±20±10 ~ ±20±20-±10 ~ ±20±50---±10 ~ ±20±50-±5 ~ ±90-±60±80±80±80±10 ~ ±20-±60-±10 ~ ±20±80±20±10 ~ ±20
                                                                                        Maximum Velocity(mm/sec)75 ~ 5001,000 ~ 1100-1,000 ~ 1000--1,000 ~ 1000150 ~ 400-200 ~ 4001,000 ~ 9001,000 ~ 90020001,000 ~ 1500-1,500 ~ 20001,000 ~ 94033 ~ 2002000 ~ 30001,000 ~ 9401,000 ~ 80075 ~ 500-1,200 ~ 1800150 ~ 350---1,200 ~ 1800150 ~ 350-400-20001,000 ~ 5001,00020001,000 ~ 90033 ~ 2002000-1,200 ~ 18001,000100 ~ 4001,000 ~ 900

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