Vacuum Valves

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• 

  XSA, Normally Closed, High Vacuum Solenoid Valve

  SMC

  A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance.
  [Features]
  · Flame-retardant (UL94V-0 compliant).
  · Two types of fittings (face seal fitting and compression fitting) and female threads (Rc, NPT) are available.
  · Moving the spring from the sliding part of the armature iron core to the body reduces the generation of particulate matter caused by contact with the spring.
  · Improved sealing performance, securely sealing with its powerful spring.
  · Power consumption: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (size 3).
  *For DC specification / class B.

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  Starting from∗ ：	312.19 €
  Min. Shipping Days ：	4 Days

  *Unit price with basic configuration

• 

  ZP2V, Vacuum Saving Valve

  SMC

  A vacuum valve which inhibits drops in vacuum pressure, even when no workpiece is present.
  [Features]
  · Keeps hold of workpieces when multiple vacuum pads are used by a single vacuum generator.
  · Protects against drops in vacuum pressure, even when some pads are not suctioning.
  · Single-action fitting models now also available.
  · No need for switching the operation when changing out workpieces.
  · Allows the simplification of control circuits when workpieces have different shapes.
  · Fixed orifice size: 0.3 mm, 0.5 mm, 0.7 mm, 1 mm.

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  Starting from∗ ：	12.45 €
  Min. Shipping Days ：	4 Days

  *Unit price with basic configuration

• 

  XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line Types

  SMC

  A vacuum valve with a pressure balanced structure.
  [Features]
  · Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
  · Precision-cast single-piece structure which helps prevent gas accumulation.
  · Interchangeable with XL Series aluminum high-vacuum angle valves.
  · Bellows type is particulate-free and cleaned.

  2D / 3D CAD data available

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  Starting from∗ ：	520.09 €
  Min. Shipping Days ：	4 Days

  *Unit price with basic configuration

• 

  Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

  SMC

  A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
  [Features]
  · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
  · Allows for compact system designs and reduced piping.
  · Prevents dust turbulence inside the chamber when exhausting.
  · Prevents pumps from running when overloaded.
  · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
  · Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
  · Low sputtering yield minimizes heavy metal contamination of wafers.

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  Starting from∗ ：	884.79 €
  Min. Shipping Days ：	26 Days

  *Unit price with basic configuration

• 

  XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed / Bellows Seal

  SMC

  Vacuum regulator with low outgassing.
  [Features]
  · Aluminum body.
  · Replaceable bellows.
  · Uniform baking temperature.
  · Lightweight and compact.
  · Little heavy metal contamination.

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  Starting from∗ ：	437.59 €
  Min. Shipping Days ：	4 Days

  *Unit price with basic configuration

• 

  Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

  SMC

  [Features]
  · Aluminum body
  · Uniform baking temperature
  · Lightweight and compact
  · Low outgassing
  · Little heavy metal contamination
  · Resistant to fluorine corrosion
  · Replaceable bellows (bellows-seal type)

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  Starting from∗ ：	462.87 €
  Min. Shipping Days ：	26 Days

  *Unit price with basic configuration

• 

  XLH, High Vacuum Manual Angle Valve, Bellows Seal

  SMC

  A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
  [Features]
  · Bellows type is particulate-free and cleaned.
  · Low actuation torque (0.5 N·m or less).
  · Spring provides a standard sealing load.
  · Handle height remains the same regardless of whether valve is open or closed.
  · Equipped as standard with an indicator for confirming if the valve is open or closed.
  · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
  · Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
  · Low sputtering yield minimizes heavy metal contamination of wafers.

  2D / 3D CAD data available

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  Starting from∗ ：	440.59 €
  Min. Shipping Days ：	4 Days

  *Unit price with basic configuration

• 

  Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

  SMC

  A vacuum valve for preventing pumps from running when overloaded.
  [Features]
  · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
  · Allows for compact system designs and reduced piping.
  · Prevents dust turbulence inside the chamber when exhausting.
  · Adjustable flow rate for initial exhaust valve.
  · Body material: SCS13 (SUS304 equivalent).
  · Precision-cast single-piece structure which helps prevent gas accumulation.
  · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

  2D / 3D CAD data available

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  Starting from∗ ：	819.61 €
  Min. Shipping Days ：	26 Days

  *Unit price with basic configuration

• 

  XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line Types

  SMC

  A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
  [Features]
  · Bellows type is particulate-free and cleaned.
  · Low actuation torque (0.5 N·m or less).
  · Spring provides a standard sealing load.
  · Handle height remains the same regardless of whether valve is open or closed.
  · Equipped as standard with an indicator for confirming if the valve is open or closed.
  · Body material: SCS13 (SUS304 equivalent).
  · Precision-cast single-piece structure which helps prevent gas accumulation.
  · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

  2D / 3D CAD data available

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  Starting from∗ ：	545.09 €
  Min. Shipping Days ：	4 Days

  *Unit price with basic configuration

• 

  XVD2, High Vacuum Valve, Smooth Vent

  SMC

  A smooth vent valve with an adjustable flow rate for both the initial and main air supplies.
  [Features]
  · An integrated valve and needle valve structure that requires on 1/4 the piping space of previous models.
  · Uses a metal diaphragm for the seat section, greatly reducing the generation of particulate matter.
  · Valve type: Normally closed (pressurize to open, spring seal).
  Fluids: Nitrogen, air, inert gas.
  · Operating temperature: 5 to 60°C (baking temperature, 150°C or less).
  · Weight: 0.5 kg.

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  Starting from∗ ：	2,169.57 €
  Min. Shipping Days ：	39 Days

  *Unit price with basic configuration

• 

  High Vacuum Air Operated Valve AVB*17 Series

  CKD

  Durable with a long service life. NC type. Light and compact thanks to adoption of aluminum alloy body.

  2D CAD data available

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  Starting from∗ ：	424.70 €
  Min. Shipping Days ：	8 Days

  *Unit price with basic configuration

• 

  High Vacuum Manual Valve MVB*17 Series

  CKD

  Stable sealing function using spring. Light and compact thanks to adoption of aluminum alloy body.

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  Starting from∗ ：	450.83 €
  Min. Shipping Days ：	8 Days

  *Unit price with basic configuration

• 

  Vacuum Controller for Vacuum Pump (with Vacuum Switch) VQP Series

  NIHON PISCO

  Vacuum controller, optimal for controlling large flow rates
  Vacuum switch specification (31‑mm wide, dual‑output vacuum switch)

  3D CAD data available

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  Starting from∗ ：	253.78 €
  Min. Shipping Days ：	12 Days

  *Unit price with basic configuration

• 

  Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

  SMC

  [Features]
  · Aluminum body
  · Uniform baking temperature
  · Lightweight and compact
  · Low outgassing
  · Little heavy metal contamination
  · Resistant to fluorine corrosion
  · Replaceable bellows (bellows-seal type)

  2D / 3D CAD data available

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  Starting from∗ ：	472.09 €
  Min. Shipping Days ：	26 Days

  *Unit price with basic configuration

• 

  Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

  SMC

  Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
  [Features]
  · Bellows type is particulate-free and cleaned.
  · Pressure balanced structure.
  · Body material: SCS13 (SUS304 equivalent).
  · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

  2D / 3D CAD data available

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  Configure now
  Starting from∗ ：	626.70 €
  Min. Shipping Days ：	26 Days

  *Unit price with basic configuration

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