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Vacuum Valves

    • XSA, Normally Closed, High Vacuum Solenoid Valve

        SMC

        XSA, Normally Closed, High Vacuum Solenoid Valve

        A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance. [Features] · Flame-retardant (UL94V-0 compliant). · Two types of fittings (face seal fitting and compression fitting) and female threads (Rc, NPT) are available. · Moving the spring from the sliding part of the armature iron core to the body reduces the generation of particulate matter caused by contact with the spring. · Improved sealing performance, securely sealing with its powerful spring. · Power consumption: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (size 3). *For DC specification / class B.
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        TypeApplicationInstallation methodNumber of PortsTypes of solenoidSwitching TypeElectromagnetic valve drive typeEffective Sectional Area(mm2)Pipe Port Type
        High Vacuum SolenoidSingle Item OperatingDirect2-port valveSingle2-position Normally ClosedLinear Motion Type-Rc / NPT / Face Seal Fitting / Compression Fitting
        Regular price (excluding VAT):
        312.19 €
        Standard shipping days:
        4 working days
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      • ZP2V, Vacuum Saving Valve

          SMC

          ZP2V, Vacuum Saving Valve

          A vacuum valve which inhibits drops in vacuum pressure, even when no workpiece is present. [Features] · Keeps hold of workpieces when multiple vacuum pads are used by a single vacuum generator. · Protects against drops in vacuum pressure, even when some pads are not suctioning. · Single-action fitting models now also available. · No need for switching the operation when changing out workpieces. · Allows the simplification of control circuits when workpieces have different shapes. · Fixed orifice size: 0.3 mm, 0.5 mm, 0.7 mm, 1 mm.
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          TypeApplicationInstallation methodNumber of PortsTypes of solenoidSwitching TypeElectromagnetic valve drive typeEffective Sectional Area(mm2)Pipe Port Type
          Vacuum operation vacuum valvesSingle Item OperatingDirect2-port valve-2-position Normally Closed-0.07 ~ 0.78M / Rc / NPT / Single-Action Pipe
          Regular price (excluding VAT):
          12.45 €
          Standard shipping days:
          4 working days
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        • Vacuum Controller for Vacuum Pump (with Vacuum Switch) VQP Series

            NIHON PISCO

            Vacuum Controller for Vacuum Pump (with Vacuum Switch) VQP Series

            Vacuum controller, optimal for controlling large flow rates Vacuum switch specification (31‑mm wide, dual‑output vacuum switch)
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            TypeApplicationInstallation methodNumber of PortsTypes of solenoidSwitching TypeElectromagnetic valve drive typeEffective Sectional Area(mm2)Pipe Port Type
            Solenoid ValveSingle Item OperatingDirect--2-position Normally Open / 2-position Normally ClosedAir Pilot-Single-Action Pipe
            Regular price (excluding VAT):
            253.78 €
            Standard shipping days:
            12 working days
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          • Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

              SMC

              Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

              A vacuum valve for preventing pumps from running when overloaded. [Features] · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve) · Allows for compact system designs and reduced piping. · Prevents dust turbulence inside the chamber when exhausting. · Adjustable flow rate for initial exhaust valve. · Body material: SCS13 (SUS304 equivalent). · Precision-cast single-piece structure which helps prevent gas accumulation. · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.
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              TypeApplicationInstallation methodNumber of PortsTypes of solenoidSwitching TypeElectromagnetic valve drive typeEffective Sectional Area(mm2)Pipe Port Type
              Pilot Vacuum ValveSingle Item OperatingDirect2-port valve-2-position Normally Closed--Flange
              Regular price (excluding VAT):
              819.61 €
              Standard shipping days:
              26 working days
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            • XM and XY / High Vacuum Valves / Stainless Steel / Angle and In-line Types / 2-port Valve

                SMC

                XM and XY / High Vacuum Valves / Stainless Steel / Angle and In-line Types / 2-port Valve

                A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction. [Features] · Bellows type is particulate-free and cleaned. · Low actuation torque (0.5 N·m or less). · Spring provides a standard sealing load. · Handle height remains the same regardless of whether valve is open or closed. · Equipped as standard with an indicator for confirming if the valve is open or closed. · Body material: SCS13 (SUS304 equivalent). · Precision-cast single-piece structure which helps prevent gas accumulation. · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.
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                TypeApplicationInstallation methodNumber of PortsTypes of solenoidSwitching TypeElectromagnetic valve drive typeEffective Sectional Area(mm2)Pipe Port Type
                Manual vacuum valveSingle Item OperatingDirect2-port valve-2-position Normally Closed--Flange
                Regular price (excluding VAT):
                545.09 €
                Standard shipping days:
                4 working days
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              • XVD2, High Vacuum Valve, Smooth Vent

                  SMC

                  XVD2, High Vacuum Valve, Smooth Vent

                  A smooth vent valve with an adjustable flow rate for both the initial and main air supplies. [Features] · An integrated valve and needle valve structure that requires on 1/4 the piping space of previous models. · Uses a metal diaphragm for the seat section, greatly reducing the generation of particulate matter. · Valve type: Normally closed (pressurize to open, spring seal). Fluids: Nitrogen, air, inert gas. · Operating temperature: 5 to 60°C (baking temperature, 150°C or less). · Weight: 0.5 kg.
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                  TypeApplicationInstallation methodNumber of PortsTypes of solenoidSwitching TypeElectromagnetic valve drive typeEffective Sectional Area(mm2)Pipe Port Type
                  Manual vacuum valveSingle Item OperatingDirect2-port valve-2-position Normally Closed-4.6Bite type Fittings
                  Regular price (excluding VAT):
                  2,169.57 €
                  Standard shipping days:
                  17 working days
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                • XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed / Bellows Seal

                    SMC

                    XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed / Bellows Seal

                    Vacuum regulator with low outgassing. [Features] · Aluminum body. · Replaceable bellows. · Uniform baking temperature. · Lightweight and compact. · Little heavy metal contamination.
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                    TypeApplicationInstallation methodNumber of PortsTypes of solenoidSwitching TypeElectromagnetic valve drive typeEffective Sectional Area(mm2)Pipe Port Type
                    Vacuum operation vacuum valvesSingle Item OperatingDirect3-port valveSingle2-position Normally Closed--Flange
                    Regular price (excluding VAT):
                    437.59 €
                    Standard shipping days:
                    4 working days
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                  • Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

                      SMC

                      Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

                      [Features] · Aluminum body · Uniform baking temperature · Lightweight and compact · Low outgassing · Little heavy metal contamination · Resistant to fluorine corrosion · Replaceable bellows (bellows-seal type)
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                      TypeApplicationInstallation methodNumber of PortsTypes of solenoidSwitching TypeElectromagnetic valve drive typeEffective Sectional Area(mm2)Pipe Port Type
                      Pilot Vacuum ValveSingle Item OperatingDirect2-port valve-2-position Normally Closed--Flange
                      Regular price (excluding VAT):
                      462.87 €
                      Standard shipping days:
                      26 working days
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                    • High Vacuum Air Operated Valve AVB*17 Series

                        CKD

                        High Vacuum Air Operated Valve AVB*17 Series

                        Durable with a long service life. NC type. Light and compact thanks to adoption of aluminum alloy body.
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                        TypeApplicationInstallation methodNumber of PortsTypes of solenoidSwitching TypeElectromagnetic valve drive typeEffective Sectional Area(mm2)Pipe Port Type
                        Vacuum operation vacuum valves----2-position Normally Closed---
                        Regular price (excluding VAT):
                        492.56 €
                        Standard shipping days:
                        8 working days
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                      • High Vacuum Manual Valve MVB*17 Series

                          CKD

                          High Vacuum Manual Valve MVB*17 Series

                          Stable sealing function using spring. Light and compact thanks to adoption of aluminum alloy body.
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                          TypeApplicationInstallation methodNumber of PortsTypes of solenoidSwitching TypeElectromagnetic valve drive typeEffective Sectional Area(mm2)Pipe Port Type
                          Manual vacuum valve--------
                          Regular price (excluding VAT):
                          450.83 €
                          Standard shipping days:
                          8 working days
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                        • XMA and XYA / High Vacuum Valves / Stainless Steel / Angle and In-line Types

                            SMC

                            XMA and XYA / High Vacuum Valves / Stainless Steel / Angle and In-line Types

                            A vacuum valve with a pressure balanced structure. [Features] · Body material: SCS13 (SUS304 equivalent). Made of stainless steel. · Precision-cast single-piece structure which helps prevent gas accumulation. · Interchangeable with XL Series aluminum high-vacuum angle valves. · Bellows type is particulate-free and cleaned.
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                            TypeApplicationInstallation methodNumber of PortsTypes of solenoidSwitching TypeElectromagnetic valve drive typeEffective Sectional Area(mm2)Pipe Port Type
                            Vacuum operation vacuum valvesSingle Item OperatingDirect2-port valve-2-position Normally Closed--Flange
                            Regular price (excluding VAT):
                            520.09 €
                            Standard shipping days:
                            4 working days
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                          • Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

                              SMC

                              Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

                              [Features] · Aluminum body · Uniform baking temperature · Lightweight and compact · Low outgassing · Little heavy metal contamination · Resistant to fluorine corrosion · Replaceable bellows (bellows-seal type)
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                              TypeApplicationInstallation methodNumber of PortsTypes of solenoidSwitching TypeElectromagnetic valve drive typeEffective Sectional Area(mm2)Pipe Port Type
                              Pilot Vacuum ValveSingle Item OperatingDirect2-port valve-2-position Normally Closed--Flange
                              Regular price (excluding VAT):
                              472.09 €
                              Standard shipping days:
                              26 working days
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                            • Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

                                SMC

                                Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

                                A high vacuum angle valve with initial exhaust valve with adjustable flow rate. [Features] · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve). · Allows for compact system designs and reduced piping. · Prevents dust turbulence inside the chamber when exhausting. · Prevents pumps from running when overloaded. · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time. · Does not contain heavy metals such as Ni (nickel) or Cr (chrome). · Low sputtering yield minimizes heavy metal contamination of wafers.
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                                TypeApplicationInstallation methodNumber of PortsTypes of solenoidSwitching TypeElectromagnetic valve drive typeEffective Sectional Area(mm2)Pipe Port Type
                                Vacuum operation vacuum valvesSingle Item OperatingDirect2-port valve-2-position Normally Closed--Flange
                                Regular price (excluding VAT):
                                884.79 €
                                Standard shipping days:
                                22 working days
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                              • XLH, High Vacuum Manual Angle Valve, Bellows Seal

                                  SMC

                                  XLH, High Vacuum Manual Angle Valve, Bellows Seal

                                  A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction. [Features] · Bellows type is particulate-free and cleaned. · Low actuation torque (0.5 N·m or less). · Spring provides a standard sealing load. · Handle height remains the same regardless of whether valve is open or closed. · Equipped as standard with an indicator for confirming if the valve is open or closed. · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time. · Does not contain heavy metals such as Ni (nickel) or Cr (chrome). · Low sputtering yield minimizes heavy metal contamination of wafers.
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                                  TypeApplicationInstallation methodNumber of PortsTypes of solenoidSwitching TypeElectromagnetic valve drive typeEffective Sectional Area(mm2)Pipe Port Type
                                  Manual vacuum valveSingle Item OperatingDirect2-port valve-2-position Normally Closed--Flange
                                  Regular price (excluding VAT):
                                  440.59 €
                                  Standard shipping days:
                                  4 working days
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                                • Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

                                    SMC

                                    Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

                                    Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation. [Features] · Bellows type is particulate-free and cleaned. · Pressure balanced structure. · Body material: SCS13 (SUS304 equivalent). · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.
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                                    TypeApplicationInstallation methodNumber of PortsTypes of solenoidSwitching TypeElectromagnetic valve drive typeEffective Sectional Area(mm2)Pipe Port Type
                                    Pilot Vacuum ValveSingle Item OperatingDirect2-port valve-2-position Normally Closed--Flange
                                    Regular price (excluding VAT):
                                    626.70 €
                                    Standard shipping days:
                                    26 working days
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