Vacuum Pad Suction Mark Prevention Type VPA One Touch Fitting Type

Vacuum Pad Suction Mark Prevention Type VPA One Touch Fitting Type
* The CAD data for this series is being revised. This will be available as soon as modifications are complete.

[Features]
· Ideal for LCD glass, coating processes, and transport of semiconductor manufacturing equipment.
· The flexible resin material adheres to work.
· Unlikely to make adhesion marks.
· Also, the characteristic separation in a workpiece at the time of vacuum breakage will increase.
· You can replace the resin pad without spanners and hexagon wrenches to detach the main body.
· Simple and compact structure.
· A wide range of pad sizes, pad materials, and holder shapes are available.
· Pad holders were added to applications with "copper-based metal not used" and "reduce ozone concentrations” requirements.
· Copper-based metal is not used for metal parts. HNBR is used for sealing rubber material.

Part Number

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Dimensions

Vacuum Pad Suction Mark Prevention Type VPA One Touch Fitting Type
Vacuum Pad Suction Mark Prevention Type VPA One Touch Fitting Type

Standard table

Model codePad O.D.
ød
Tube O.D.
øD
Thread
M
BLTube end
C
Hex.
H1
Hex.
H2
Connection
config. code
VPA10Q[5]-6J[9]106M12×1401811.71412-M4
VPA20Q[5]-3J203M12×150.619.910.91412-M6
VPA20Q[5]-4J[9]4
VPA20Q[5]-6J[9]6M14×141.619.511.71714
VPA30Q[5]-3J303M12×150.619.910.91412
VPA30Q[5]-4J[9]4
VPA30Q[5]-6J[9]6M14×141.619.511.71714

Units: mm

*[5]: Replaced with Pad rubber material code. Refer to the catalog for details.
*[9]: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts).
*Tightening torque of a pad holder fixing bulkhead nut is as below.
     ▪Pad dia.: ø10 mm ▶ 12~14 N·m. ø20~30 mm ▶ 18~21 N·m

Part Number
VPA10QK-6J
VPA10QKE-6J
VPA10QM-6J
VPA20QK-6J
VPA20QK-6J-ECV
VPA20QKE-6J
VPA20QM-6J
VPA30QK-6J
VPA30QKE-6J
VPA30QM-6J
Part Number
Standard Unit Price
Minimum order quantityVolume Discount
Standard
Shipping Days
?
Resin Group Material Usage Environment Color Outer Diameter D
(φ)
Full length B
(mm)
Mount Connection Screw Fall Prevention Valve

63.68 €

1 10 Days [PEEK] PEEKStandard-1040.1M12None

72.84 €

1 10 Days [PEEK] Conductive PEEKStandard / Static electricity diffusionBlack1040.1M12None

60.92 €

1 10 Days POMStandard[White] White1040.1M12None

77.87 €

1 10 Days [PEEK] PEEKStandard-2041.6M14None

91.61 €

1 10 Days [PEEK] PEEKStandard-2041.6M14With Fall Prevention Valve

91.61 €

1 10 Days [PEEK] Conductive PEEKStandard / Static electricity diffusionBlack2041.6M14None

70.54 €

1 10 Days POMStandard[White] White2041.6M14None

91.61 €

1 10 Days [PEEK] PEEKStandard-3041.6M14None

109.94 €

1 10 Days [PEEK] Conductive PEEKStandard / Static electricity diffusionBlack3041.6M14None

79.71 €

1 10 Days POMStandard[White] White3041.6M14None

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Basic information

Pad type Standard / Holder Set Pad Type Prevention of Adsorption Trace Mounting Method Pad Screw Fixed
Material Resin Height L1(mm) 5.3 Mounting Bracket Fixed Type
Stroke(mm) 1 Vacuum Outlet Direction Top Vacuum Outlet Tube Outer Diameter(φ) 6
Direct Attached Filter None Metal parts material Standard Specifications Swiveling angle 16°

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