Clean Gas Filter: Disposable Type / Multiple Disc Type, SFC100 Series
Clean gas filter with highly reliable PTFE membrane.
[Features]
· Replaceable elements.
· Precision filtration of compressed air and nitrogen for semiconductor processes.
· Filtration: 0.01 μm (filtration efficiency 99.99%).
· Disposable type / multiple disc type.
· Connection method: Rc/TSJ/URJ.
· Nominal piping thread: 1/4, 3/8.
· RoHS compliant.
[Features]
· Replaceable elements.
· Precision filtration of compressed air and nitrogen for semiconductor processes.
· Filtration: 0.01 μm (filtration efficiency 99.99%).
· Disposable type / multiple disc type.
· Connection method: Rc/TSJ/URJ.
· Nominal piping thread: 1/4, 3/8.
· RoHS compliant.
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*The information above is correct as of December 2018. - See catalog for specification details.
- Product images may be representative images. Refer to the catalog for details.
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Basic information
| Type | Standard | Compressed Air Quality | General Dry Air | Filtration Level | 0.01μm |
|---|---|---|---|---|---|
| Treatment Air Flow Rate(l/min) | 240 | Usage Environment | Clean Room Specifications (Prevent dust) | Drain Cock | NA |
| Bowl Material | EN 1.4401 Equiv. | Bowl Guard | NA | Operating Pressure Range(MPa) | null::0.99 |
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
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