SMC Vacuum Valves（Type：Vacuum operation vacuum valves）
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ZP2V, Vacuum Saving Valve
SMC
A vacuum valve which inhibits drops in vacuum pressure, even when no workpiece is present.
[Features]
· Keeps hold of workpieces when multiple vacuum pads are used by a single vacuum generator.
· Protects against drops in vacuum pressure, even when some pads are not suctioning.
· Single-action fitting models now also available.
· No need for switching the operation when changing out workpieces.
· Allows the simplification of control circuits when workpieces have different shapes.
· Fixed orifice size: 0.3 mm, 0.5 mm, 0.7 mm, 1 mm.- 2D / 3D CAD data available
Starting from∗ ： 12.45 € Min. Shipping Days ： 4 Days *Unit price with basic configuration
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XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed / Bellows Seal
SMC
Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.- 2D / 3D CAD data available
Starting from∗ ： 437.59 € Min. Shipping Days ： 4 Days *Unit price with basic configuration
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XMA and XYA / High Vacuum Valves / Stainless Steel / Angle and In-line Types
SMC
A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.- 2D / 3D CAD data available
Starting from∗ ： 520.09 € Min. Shipping Days ： 4 Days *Unit price with basic configuration
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Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series
SMC
A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.- 2D / 3D CAD data available
Starting from∗ ： 884.79 € Min. Shipping Days ： 22 Days *Unit price with basic configuration
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| Number of Ports |
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| Switching Type |
| Electromagnetic valve drive type |
| Effective Sectional Area(mm2) |
| Pipe Port Type |
| Nominal Pipe Thread Size |
| Connection tube diameter |
| Flange Type |
| Flange Calls |
| Cv Value |
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| Brand | SMC | SMC | SMC | SMC |
| Product Series | XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed / Bellows Seal | XMA and XYA / High Vacuum Valves / Stainless Steel / Angle and In-line Types | ||
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| Starting from∗ | 12.45 € *Unit price with basic configuration | 437.59 € *Unit price with basic configuration | 520.09 € *Unit price with basic configuration | 884.79 € *Unit price with basic configuration |
| Min. Shipping Days ： | 4 Days | 4 Days | 4 Days | 22 Days |
| Type | Vacuum operation vacuum valves | Vacuum operation vacuum valves | Vacuum operation vacuum valves | Vacuum operation vacuum valves |
| Application | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating |
| Installation method | Direct | Direct | Direct | Direct |
| Number of Ports | 2-port valve | 3-port valve | 2-port valve | 2-port valve |
| Types of solenoid | - | Single | - | - |
| Switching Type | 2-position Normally Closed | 2-position Normally Closed | 2-position Normally Closed | 2-position Normally Closed |
| Electromagnetic valve drive type | - | - | - | - |
| Effective Sectional Area(mm2) | 0.07 ～ 0.78 | - | - | - |
| Pipe Port Type | M / Rc / NPT / Single-Action Pipe | Flange | Flange | Flange |
| Nominal Pipe Thread Size | M5 / 1/8 / M6 / M8 | - | - | - |
| Connection tube diameter | Ø4 / Ø6 | - | - | - |
| Flange Type | - | NW / Other | NW / Other | KF |
| Flange Calls | - | 16 / 25 / 40 / 63 | 16 / 25 / 40 / 50 / 63 | 25 / 40 |
| Cv Value | 0.0037940379 ～ 0.0422764228 | - | - | - |
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Electromagnetic valve drive type
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Effective Sectional Area(mm2)
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Connection tube diameter
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Flange Calls
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