XLH, High Vacuum Manual Angle Valve, Bellows Seal (Part Numbers - CAD Download)

XLH, High Vacuum Manual Angle Valve, Bellows Seal
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

(i)Remark

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Part Number

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the corresponding part number is displayed here.

Part Number
XLH-16
XLH-25
XLH-25-XN1A
Part Number
Standard Unit Price
Minimum order quantityVolume Discount
Standard
Shipping Days
?
Flange Calls Sonic Conductance Seal material Amount of leakage
(Pa·m3/s)
Seal Change Location

440.59 €

1 4 Days 165L/SFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None

458.96 €

1 4 Days 2514L/SFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None

460.73 €

1 26 Days 2514L/SEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal

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Basic information

Type Manual vacuum valve Application Single Item Operating Installation method Direct
Number of Ports 2-port valve Switching Type 2-position Normally Closed Pipe Port Type Flange
Flange Type KF Seal Type Bellows seal Body Surface Treatment External: hard anodized aluminum, Internal: base material
Heater Yes/No None

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