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Single Axis Robots（Main Body, Peripheral Components：Main Body）

Data to be displayed: 30; 45; 60

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Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

SMC

[Features]
·Easy to install the main body / reduce installation man-hours
The main body can be installed without removing exterior parts such as covers.
·Table position can be detected by auto switch
·Up to 4 locations can be attached to both sides of the body
·Ball screw drive

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Starting from^∗ ：	988.33 €
Min. Shipping Days ：	4 Days

*Unit price with basic configuration

Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

SMC

[Features]
·Supports long strokes: MAX. 500 mm
·Direct mounting 3 directions, metal fitting mounting 3 types
·Auto switch can be installed
·Speed control / positioning: Up to 64 points
·Pressing control can be switched
Can be held with the rod pressed against the work, etc.

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Starting from^∗ ：	595.53 €
Min. Shipping Days ：	7 Days

*Unit price with basic configuration

Electric cylinder LZB series

SMC

It can be used like an air cylinder. -The drive system is a sliding screw.

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Starting from^∗ ：	278.34 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric actuator rod type motorless specification LEY series

SMC

It can be combined with your familiar motors and drivers.

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Starting from^∗ ：	475.09 €
Min. Shipping Days ：	9 Days

*Unit price with basic configuration

Electric actuator rod type with guide motorless specification LEYG series

SMC

[Features] It can be combined with your familiar motors and drivers.

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Starting from^∗ ：	766.57 €
Min. Shipping Days ：	7 Days

*Unit price with basic configuration

Single Axis Robots RS2 / Linear

MISUMI

2D / 3D CAD data available

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Min. Shipping Days ：	14 Days

Electric actuator slider type belt drive motorless specification LEFB series

SMC

It can be combined with your familiar motors and drivers.

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Starting from^∗ ：	1,149.43 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

SMC

[Features]
·The guide rod is compactly integrated to achieve lateral load resistance and high-precision detent.
·Tip lateral load: 5 times (Comparison of rod type, size 25, 100 strokes)
·Compatible with plain bearings and ball bush bearings
·Pressing control can be switched
Can be held with the rod pressed against the work, etc.

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Starting from^∗ ：	760.19 €
Min. Shipping Days ：	7 Days

*Unit price with basic configuration

Electric actuator rod type LEY series AC servo motor LECS□

SMC

[Features]
·High-Power Motor (100W/200W)
·Improved high-speed transport capacity
·Supports high acceleration / deceleration (5,000 mm/s2)
·Equipped with absolute encoder

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Starting from^∗ ：	1,000.57 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric slide table high rigidity type LESH series

SMC

Integrated circulation type linear guide with integrated guide rail and table.
[Features]
·Compact, Space-Saving
·61% reduction in volume
·Built-in motor in the body
·Symmetrical L type: The position of the table and cable is opposite to that of the R type, expanding the range of design.
·Motor straight type D type: Width dimension shortened, MAX. 45% reduced

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Starting from^∗ ：	695.53 €
Min. Shipping Days ：	8 Days

*Unit price with basic configuration

Electric Actuator Miniature Slide Table Type LEPS Series Step Motor

SMC

[Features]
·High thrust type / basic type
·Compact type motor with excellent compactness and weight reduction

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Starting from^∗ ：	598.76 €
Min. Shipping Days ：	15 Days

*Unit price with basic configuration

Electric actuator rod type LEY series AC servo motor LECY□

SMC

[Features]
·High-Power Motor (100W/200W/400W)
·Improved high-speed transport capacity
·Supports high acceleration / deceleration (5,000 mm/s2)
·Equipped with absolute encoder

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Starting from^∗ ：	1,173.60 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

SMC

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Starting from^∗ ：	1,432.34 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric actuator slider type belt drive LEFB series AC servo motor LECY□

SMC

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Starting from^∗ ：	1,995.80 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric actuator rod type dust-proof and drip-proof specification LEY series AC servo motor LECS□

SMC

[Features]
·Protective Enclosure: IP65 equivalent (Option selection)
·Supports up to 800 mm stroke

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Starting from^∗ ：	1,878.61 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Promotional pricing

Electric Slide Table, Compact Type LES Series

SMC

A compact-type electric actuator.
[Features]
· Compact: Workpiece mounting height reduced by up to 12% compared to LESH.
· Vertical work load: increased by up to 50%.
· Lightweight: reduced by up to 29%.
· Maximum pushing force: 180 N.
· Positioning repeatability: ±0.05 mm.
· Reduced cycle time. (Maximum acceleration/deceleration: 5,000 mm/S2, Maximum speed: 400 mm/s)

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Starting from^∗ ：	627.53 €
	Special price
Min. Shipping Days ：	Same day

*Unit price with basic configuration

Electric actuator miniature rod type LEPY series step motor (Servo 24 V DC)

SMC

[Features]
・ Small and lightweight
·Manual operation screw: Adjustable when the power for rod / table drive is off

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Starting from^∗ ：	493.87 €
Min. Shipping Days ：	15 Days

*Unit price with basic configuration

Electric Actuator Slider Type Belt Drive LEFB Series Step Motor/Servo Motor

SMC

A slider-type electric actuator.
[Features]
· Maximum stroke: 2,000 mm (step motor [24‑V DC servo]).
· Maximum speed: 2,000 mm/s (step motor [24‑V DC servo]).
· Positioning repeatability: ±0.08 mm (step motor [24‑V DC servo]).
· Maximum speed: 2,000 mm/s (AC servo motor).
· Maximum stroke: 3,000 mm (AC servo motor).
· Maximum acceleration/deceleration: 20,000 mm/S2 (AC servo motor).
· Pulse input type, with absolute encoder (AC servo motor).
· Positioning Repeatability: ±0.06 mm (AC servo motor).

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Starting from^∗ ：	924.41 €
Min. Shipping Days ：	4 Days

*Unit price with basic configuration

Promotional pricing

Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

SMC

A motorless specification electric actuator.
[Features]
· The motorless design permits the mounting of various servo motors.
· Compatible with motors/drivers that have been conventionally used.
· Slider type.
· RoHS compliant.
· Size 25 - stroke: 50 to 800 mm.
· Size 32 - stroke: 50 to 1,000 mm.
· Size 40 - stroke: 150 to 1,200 mm.

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Starting from^∗ ：	968.29 €
	Special price
Min. Shipping Days ：	Same day

*Unit price with basic configuration

Electric Cylinder, EAC Series

ORIENTAL MOTOR

An electric cylinder equipped with the highly efficient and energy saving AlphaStep AZ Series / AR Series in the motor section.
In addition to the straight type actuator, the manufacturer has prepared a folded type that shortens the overall length and contributes to space saving.
[Features]
・ Compact, high thrust, compatible with a wide range of applications
・ Performance independent of operating conditions
・ Easy to replace the belt (Folded type)

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Starting from^∗ ：	496.18 €
Min. Shipping Days ：	18 Days

*Unit price with basic configuration

Single Axis Robots RS1 / Linear

MISUMI

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Min. Shipping Days ：	14 Days

Card motor LAT3 series

SMC

Miniaturize the transport / pressing / length measurement system using a linear motor.
[Features]
·Simple programming (Enter tact time)
Complete by entering only 3 items: travel time, target position, and loading mass

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Starting from^∗ ：	522.24 €
Min. Shipping Days ：	17 Days

*Unit price with basic configuration

Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

SMC

[Features] It can be combined with your familiar motors and drivers.

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Starting from^∗ ：	1,932.06 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

SMC

[Features]
·Thin low center of gravity
The table height is thinned by the belt drive and the offset structure of the guide part.
·Air cylinder-like end-to-end control (12 intermediate stops possible). Easy position setting by numerical input
·Compatible with conventional E-MY2 series
·High maintainability
·Motor Mounting Position: Up / down, left / right selectable
·Non-contact auto switch can be installed for limit confirmation and intermediate signal confirmation

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Starting from^∗ ：	1,094.31 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

SMC

[Features]
·Protective Enclosure: IP65 equivalent
·Supports up to 500 mm stroke

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Starting from^∗ ：	1,128.06 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

SMC

Vacuum suction from the vacuum port suppresses dust generation from the ball screw and guide to the outside.
[Features]
·Built-in vacuum piping
·The main body can be installed without removing exterior parts such as covers.
·Body body linear guide specifications

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Starting from^∗ ：	1,348.27 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Single Axis Robots RS3 / Linear

MISUMI

2D / 3D CAD data available

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Min. Shipping Days ：	14 Days

Electric actuator slider type belt drive LEFB series AC servo motor LECS□

SMC

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Starting from^∗ ：	1,209.41 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

SMC

[Features]
·Thin low center of gravity
·High precision / high rigidity
·Reduction of installation man-hours
·Weight reduced by about 37%
·No interference with the workpiece motor
·Belt drive

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Starting from^∗ ：	2,232.19 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Rod Type with Support Guide

MISUMI

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Min. Shipping Days ：	14 Days

Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

SMC

[Features]
·Thin low center of gravity
·High precision / high rigidity
·Reduction of installation man-hours
·Weight reduced by about 37%
·No interference with the workpiece motor
·Ball screw drive

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Starting from^∗ ：	2,562.24 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric Actuator Guide Rod Slider Belt Drive LEL Series Step Motor

SMC

[Features]
·Thin low center of gravity
·High precision / high rigidity
·Reduction of installation man-hours
·Weight reduced by about 37%
·No interference with the workpiece motor
·Belt drive

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Starting from^∗ ：	520.43 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Single Axis Robot RSH1

MISUMI

2D / 3D CAD data available

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Min. Shipping Days ：	19 Days

Single Axis Robots RSD2 / Rod Type

MISUMI

2D / 3D CAD data available

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Min. Shipping Days ：	14 Days

Rod Type with Support Guide

MISUMI

2D / 3D CAD data available

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Min. Shipping Days ：	14 Days

Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

SMC

[Features]
·Thin low center of gravity
The table height is thinned by the belt drive and the offset structure of the guide part.
·Air cylinder-like end-to-end control (12 intermediate stops possible)
·Easy position setting by numerical input
·Compatible with conventional E-MY2 series
·Can be combined with various guides
·Motor Mounting Position: Up / down, left / right selectable
·Non-contact auto switch can be installed for limit confirmation and intermediate signal confirmation!

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Starting from^∗ ：	679.23 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric Actuator, Low Profile Slider Type, Linear Guide 1-Axis/2-Axis, LEMH/LEMHT Series

SMC

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Starting from^∗ ：	1,319.73 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric actuator guided rod type LEYG series AC servo motor LECS□

SMC

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Starting from^∗ ：	1,213.06 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

SMC

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Starting from^∗ ：	918.92 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric Slider, EZS Series

ORIENTAL MOTOR

The EZS Series is a compact, high stiffness, simple dust-proof electric slider.
Equipped with AlphaStep AZ Series and AR Series in the motor part. High response, low vibration, and movement without hunting, which are unique to stepper motors, are realized with an electric slider.
[Features]
・ High stiffness and low profile guide
・ Space saving by the folded motor
・ Simple dust-proof structure prevents foreign object from entering and suppresses dust generation
・ Cleanroom compatible

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Starting from^∗ ：	644.09 €
Min. Shipping Days ：	18 Days

*Unit price with basic configuration

Single Axis Robots RS1 / Motor Wrap

MISUMI

2D / 3D CAD data available

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Min. Shipping Days ：	14 Days

Single Axis Robots RS3 Motor Wrap

MISUMI

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Min. Shipping Days ：	14 Days

Single Axis Robots RSH5 / Linear

MISUMI

2D / 3D CAD data available

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Min. Shipping Days ：	19 Days

Single Axis Robots RSB1 / Belt Type

MISUMI

2D / 3D CAD data available

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Min. Shipping Days ：	19 Days

Electric actuator rod type with guide LEYG series AC servo motor LECY□

SMC

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Starting from^∗ ：	1,570.63 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration


Brand
Product Series
CAD
Starting from^∗
Min. Shipping Days
Main Body, Peripheral Components
Type
Stroke(mm)
Max. Transportable Mass Range (Horizontal)(kg)
Max. Transportable Mass (Horizontal)(kg)
Max. Transportable Mass Range (Vertical)(kg)
Max. Transportable Mass (Vertical)(kg)
Drive Method
Guide
Lead(mm)
Input Power Supply
Position Detection
I/O Module
Table Width W1(mm)
Brake
Max. Thrust Force Range(N)
Max. Thrust Force(N)
Noise Filters
Table Length L1(mm)
Usage Environment
Positioning Repeatability(µm)
Maximum Velocity(mm/sec)

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Brand	SMC	SMC	SMC	SMC	SMC	MISUMI	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	ORIENTAL MOTOR	MISUMI	SMC	SMC	SMC	SMC	SMC	MISUMI	SMC	SMC	MISUMI	SMC	SMC	MISUMI	MISUMI	MISUMI	SMC	SMC	SMC	SMC	ORIENTAL MOTOR	MISUMI	MISUMI	MISUMI	MISUMI	SMC
Product Series	Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor	Electric Actuator Rod Type LEY Series Step Motor/Servo Motor	Electric cylinder LZB series	Electric actuator rod type motorless specification LEY series	Electric actuator rod type with guide motorless specification LEYG series	Single Axis Robots RS2 / Linear	Electric actuator slider type belt drive motorless specification LEFB series	Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor	Electric actuator rod type LEY series AC servo motor LECS□	Electric slide table high rigidity type LESH series	Electric Actuator Miniature Slide Table Type LEPS Series Step Motor	Electric actuator rod type LEY series AC servo motor LECY□	Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□	Electric actuator slider type belt drive LEFB series AC servo motor LECY□	Electric actuator rod type dust-proof and drip-proof specification LEY series AC servo motor LECS□	Electric Slide Table, Compact Type LES Series	Electric actuator miniature rod type LEPY series step motor (Servo 24 V DC)	Electric Actuator Slider Type Belt Drive LEFB Series Step Motor/Servo Motor	Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series	Electric Cylinder, EAC Series	Single Axis Robots RS1 / Linear	Card motor LAT3 series	Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series	Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor	Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□	Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□	Single Axis Robots RS3 / Linear	Electric actuator slider type belt drive LEFB series AC servo motor LECS□	Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□	Rod Type with Support Guide	Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□	Electric Actuator Guide Rod Slider Belt Drive LEL Series Step Motor	Single Axis Robot RSH1	Single Axis Robots RSD2 / Rod Type	Rod Type with Support Guide	Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor	Electric Actuator, Low Profile Slider Type, Linear Guide 1-Axis/2-Axis, LEMH/LEMHT Series	Electric actuator guided rod type LEYG series AC servo motor LECS□	Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series	Electric Slider, EZS Series	Single Axis Robots RS1 / Motor Wrap	Single Axis Robots RS3 Motor Wrap	Single Axis Robots RSH5 / Linear	Single Axis Robots RSB1 / Belt Type	Electric actuator rod type with guide LEYG series AC servo motor LECY□
CAD	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D		2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D		2D / 3D	2D / 3D	2D / 3D	2D / 3D
Starting from^∗	988.33 € *Unit price with basic configuration	595.53 € *Unit price with basic configuration	278.34 € *Unit price with basic configuration	475.09 € *Unit price with basic configuration	766.57 € *Unit price with basic configuration	-	1,149.43 € *Unit price with basic configuration	760.19 € *Unit price with basic configuration	1,000.57 € *Unit price with basic configuration	695.53 € *Unit price with basic configuration	598.76 € *Unit price with basic configuration	1,173.60 € *Unit price with basic configuration	1,432.34 € *Unit price with basic configuration	1,995.80 € *Unit price with basic configuration	1,878.61 € *Unit price with basic configuration	627.53 € Special price *Unit price with basic configuration Promotional pricing	493.87 € *Unit price with basic configuration	924.41 € *Unit price with basic configuration	968.29 € Special price *Unit price with basic configuration Promotional pricing	496.18 € *Unit price with basic configuration	-	522.24 € *Unit price with basic configuration	1,932.06 € *Unit price with basic configuration	1,094.31 € *Unit price with basic configuration	1,128.06 € *Unit price with basic configuration	1,348.27 € *Unit price with basic configuration	-	1,209.41 € *Unit price with basic configuration	2,232.19 € *Unit price with basic configuration	-	2,562.24 € *Unit price with basic configuration	520.43 € *Unit price with basic configuration	-	-	-	679.23 € *Unit price with basic configuration	1,319.73 € *Unit price with basic configuration	1,213.06 € *Unit price with basic configuration	918.92 € *Unit price with basic configuration	644.09 € *Unit price with basic configuration	-	-	-	-	1,570.63 € *Unit price with basic configuration
Min. Shipping Days	4 Days	7 Days	26 Days	9 Days	7 Days	14 Days	26 Days	7 Days	26 Days	8 Days	15 Days	26 Days	26 Days	26 Days	26 Days	Same day	15 Days	4 Days	Same day	18 Days	14 Days	17 Days	26 Days	26 Days	26 Days	26 Days	14 Days	26 Days	26 Days	14 Days	26 Days	26 Days	19 Days	14 Days	14 Days	26 Days	26 Days	26 Days	26 Days	18 Days	14 Days	14 Days	19 Days	19 Days	26 Days
Main Body, Peripheral Components	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body
Type	Sliders	Rods	Rods	Rods	Rods	Sliders	Sliders	Rods	Rods	Sliders	Sliders	Rods	Sliders	Sliders	Rods	Sliders	Rods	Sliders	Sliders	Sliders	Sliders	Sliders	Sliders	Sliders	Rods	Sliders	Sliders	Sliders	Sliders	Rods	Sliders	Sliders	Sliders	Rods	Rods	Sliders	Sliders	Rods	Sliders	Sliders	Sliders	Sliders	Sliders	Sliders	Rods
Stroke(mm)	1,000 ～ 950	30 ～ 500	10 ～ 200	30 ～ 800	30 ～ 300	50 ～ 800	1,000 ～ 3000	30 ～ 300	30 ～ 500	50 ～ 150	25 ～ 50	30 ～ 800	1,000 ～ 950	1,000 ～ 3000	50 ～ 800	30 ～ 150	25 ～ 75	1,000 ～ 900	1,000 ～ 950	50 ～ 300	50 ～ 400	10 ～ 50	1,000 ～ 900	1,000 ～ 1700	30 ～ 500	1,000 ～ 900	50 ～ 800	1,000 ～ 3000	1,000 ～ 3000	50 ～ 200	1,000 ～ 900	1,000 ～ 900	150 ～ 800	50 ～ 300	50 ～ 300	1,000 ～ 1700	1,000 ～ 1400	30 ～ 300	1,000 ～ 850	50 ～ 850	50 ～ 400	50 ～ 800	150 ～ 1050	150 ～ 2550	50 ～ 300
Max. Transportable Mass Range (Horizontal)(kg)	2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 150.1 or Higher	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	2.1 to 5.0 / 5.1 to 10.0	2.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.0	2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0	0 to 2.0	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 150.1 or Higher	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	2.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.0	20.1 to 50.0 / 50.1 to 100.0 / 150.1 or Higher	0 to 2.0 / 2.1 to 5.0	0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0	0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0	0 to 2.0	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	5.1 to 10.0 / 10.1 to 20.0	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	5.1 to 10.0 / 10.1 to 20.0	2.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.0	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	5.1 to 10.0 / 10.1 to 20.0	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	2.1 to 5.0	10.1 to 20.0 / 20.1 to 50.0	20.1 to 50.0	20.1 to 50.0 / 50.1 to 100.0	5.1 to 10.0 / 10.1 to 20.0	5.1 to 10.0 / 10.1 to 20.0	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0	5.1 to 10.0 / 10.1 to 20.0	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	5.1 to 10.0	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0
Max. Transportable Mass (Horizontal)(kg)	5 ～ 65	3 ～ 90	2.4 ～ 20	18 ～ 200	18 ～ 60	4 ～ 10	5 ～ 25	3 ～ 90	18 ～ 60	1 ～ 12	0.75 ～ 2	18 ～ 200	10 ～ 60	5 ～ 25	40 ～ 200	1 ～ 5	1 ～ 6	1 ～ 19	10 ～ 60	7.5 ～ 15	2 ～ 6	1	15 ～ 85	10 ～ 20	18 ～ 60	20 ～ 60	6 ～ 12	5 ～ 25	10 ～ 30	10 ～ 20	15 ～ 85	3 ～ 5	12 ～ 40	25 ～ 45	50 ～ 60	6 ～ 11	10 ～ 20	18 ～ 60	9 ～ 65	7.5 ～ 15	2 ～ 6	6 ～ 12	15 ～ 80	10	18 ～ 60
Max. Transportable Mass Range (Vertical)(kg)	0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	-	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 100.1 or Higher	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	0 to 2.0	-	0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	0 to 2.0 / 2.1 to 5.0	0 to 2.0	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 100.1 or Higher	2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	-	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 100.1 or Higher	0 to 2.0 / 2.1 to 5.0	0 to 2.0	-	2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	0 to 2.0 / 2.1 to 5.0	0 to 2.0	2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0	-	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	0 to 2.0 / 2.1 to 5.0	-	-	2.1 to 5.0 / 5.1 to 10.0	2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0	-	2.1 to 5.0 / 5.1 to 10.0	2.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.0	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	-	-	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	0 to 2.0 / 2.1 to 5.0	0 to 2.0 / 2.1 to 5.0	2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0	-	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0
Max. Transportable Mass (Vertical)(kg)	0.5 ～ 23	2 ～ 53	-	8 ～ 115	7 ～ 44	1 ～ 2	-	1.5 ～ 51	8 ～ 46	0.25 ～ 4	0.25 ～ 1.5	8 ～ 115	4 ～ 30	-	19 ～ 115	0.25 ～ 5	0.25 ～ 1.5	-	4 ～ 30	2 ～ 14	1 ～ 4	0.05 ～ Not vertical	3 ～ 20	-	8 ～ 46	8 ～ 30	2 ～ 4	-	-	3.5 ～ 7.5	3 ～ 20	-	4 ～ 8	5 ～ 25	8.5 ～ 28.5	-	-	7 ～ 44	2 ～ 23	3.5 ～ 14	1 ～ 4	2 ～ 4	4 ～ 20	-	7 ～ 44
Drive Method	Rolled Ball Screw	Rolled Ball Screw	Slide Screws	Rolled Ball Screw	Rolled Ball Screw	Rolled Ball Screw	Belts	Rolled Ball Screw	Rolled Ball Screw	Slide Screws	Rolled Ball Screw	Rolled Ball Screw	Rolled Ball Screw	Belts	Rolled Ball Screw	Slide Screws	Slide Screws	Belts	Rolled Ball Screw	Rolled Ball Screw	Rolled Ball Screw	Linear Motor	Rolled Ball Screw	Belts	Rolled Ball Screw	Rolled Ball Screw	Rolled Ball Screw	Belts	Belts	Rolled Ball Screw	Rolled Ball Screw	Belts	Rolled Ball Screw	Rolled Ball Screw	Rolled Ball Screw	Belts	Belts	Rolled Ball Screw	Rolled Ball Screw	Rolled Ball Screw	Rolled Ball Screw	Rolled Ball Screw	Rolled Ball Screw	Belts	Rolled Ball Screw
Guide	Provided	Not Provided	Not Provided	Provided	Provided	-	Provided	Provided	Not Provided	Provided	Provided	Not Provided	Provided	Provided	Not Provided	Provided	Provided	Provided	Provided	Not Provided / Provided	-	Provided	Provided	Provided	Not Provided	Provided	-	Provided	Provided	Provided	Provided	Provided	-	Not Provided	Provided	Provided	Provided	Provided	Provided	Provided	-	-	Provided	Provided	Provided
Lead(mm)	5 ～ 30	2.5 ～ 16	2 ～ 12	2.86 ～ 20	3 ～ 20	6 ～ 20	54 equivalent	2.5 ～ 16	3 ～ 20	4 ～ 16	4 ～ 10	2.86 ～ 20	6 ～ 30	54 equivalent	2.86 ～ 20	4 ～ 16	4 ～ 10	48 ～ Equivalent to 48	6 ～ 30	3	2 ～ 12	-	8 ～ 30	Equivalent to 48	3 ～ 20	6 ～ 20	6 ～ 20	54 equivalent	27 ～ 42	6 ～ 12	8 ～ 30	Equivalent to 48	6 ～ 20	2 ～ 12	2 ～ 12	Equivalent to 48	Equivalent to 48	3 ～ 20	5 ～ 20	-	2 ～ 12	6 ～ 20	5 ～ 30	25 Equivalent	4 ～ 12
Input Power Supply	24 V DC	24 V DC	24 V DC	-	-	24 V DC	-	24 V DC	-	24 V DC	24 V DC	-	-	-	-	24 V DC	24 V DC	24 V DC	-	24 V DC ～ Single-Phase, 200 to 240 V AC	24 V DC	24 V DC	-	24 V DC	-	-	24 V DC	-	-	24 V DC	-	24 V DC	Single-Phase, 200 to 230 V AC	24 V DC	24 V DC	24 V DC	24 V DC	-	24 V DC	24/48 V DC ～ Single-Phase, 200 to 240 V AC	24 V DC	24 V DC	Single-Phase, 200 to 230 V AC	Single-Phase, 200 to 230 V AC	-
Position Detection	Incremental	Incremental	-	-	-	Incremental	-	Incremental	Incremental / Absolute	Incremental	Incremental	Absolute	Incremental / Absolute	Absolute	Incremental / Absolute	Incremental	Incremental	Incremental	Incremental	Absolute	Incremental	Incremental	-	Incremental	Incremental / Absolute	Incremental / Absolute	Incremental	Incremental / Absolute	Incremental / Absolute	Incremental	Incremental / Absolute	Incremental	Incremental / Absolute	Incremental	Incremental	Incremental	Incremental	Incremental / Absolute	Incremental	Absolute	Incremental	Incremental	Incremental / Absolute	Incremental / Absolute	Absolute
I/O Module	NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET	NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET	NPN / PNP / Not Provided	-	-	NPN / PNP / CC-Link / DeviceNet	-	NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / PROFINET	-	NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET	NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET	-	-	-	-	NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET	NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET	NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET	-	Not Provided	NPN / PNP / CC-Link / DeviceNet	NPN / PNP / Not Provided	-	NPN / PNP / Ethernet / Not Provided / PROFINET	-	-	NPN / PNP / CC-Link / DeviceNet	-	-	NPN / PNP / CC-Link / DeviceNet	-	NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET	NPN / PNP / CC-Link / DeviceNet	NPN / PNP / CC-Link / DeviceNet	NPN / PNP / CC-Link / DeviceNet	NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET	NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET	-	NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET	Not Provided	-	NPN / PNP / CC-Link / DeviceNet	NPN / PNP / CC-Link / DeviceNet	NPN / PNP / CC-Link / DeviceNet	-
Table Width W1(mm)	39.4 ～ 74	-	-	-	-	50	50 ～ 74	-	-	32 ～ 61	19 ～ 24	-	50 ～ 74	50 ～ 74	-	32.2 ～ 60	-	39.4 ～ 60	50 ～ 74	-	41	49	105 ～ 129	72.4 ～ 108.7	-	50 ～ 74	52	50 ～ 74	105 ～ 129	-	105 ～ 129	56	80	-	-	61	50.4 ～ 124.7	-	39.4 ～ 74	54	41	52	135	100	-
Brake	Not Provided / Provided	Not Provided / Provided	Not Provided	Not Provided	Not Provided	Not Provided / Provided	Not Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided	Not Provided / Provided	Not Provided	Not Provided / Provided	Not Provided / Provided	Not Provided	Not Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided	Not Provided / Provided
Max. Thrust Force Range(N)	0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000	0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More	0 to 100 / 101 to 200	101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More	101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000	0 to 100	0 to 100 / 101 to 200 / 201 to 300	0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More	101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000	0 to 100 / 101 to 200	0 to 100	101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More	0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000	0 to 100 / 101 to 200 / 201 to 300	501 to 1000 / 1,001 or More	0 to 100 / 101 to 200	0 to 100	-	0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000	0 to 100 / 101 to 200 / 301 to 500	0 to 100 / 101 to 200	0 to 100	101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000	0 to 100 / 101 to 200	101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000	101 to 200 / 301 to 500 / 501 to 1000	0 to 100 / 101 to 200	0 to 100 / 101 to 200 / 201 to 300	0 to 100 / 101 to 200 / 201 to 300	0 to 100	101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000	0 to 100	0 to 100 / 101 to 200 / 201 to 300	101 to 200 / 201 to 300 / 501 to 1000	201 to 300 / 501 to 1000	0 to 100 / 101 to 200	0 to 100 / 101 to 200	101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000	0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000	0 to 100 / 101 to 200 / 301 to 500	0 to 100 / 101 to 200	0 to 100 / 101 to 200	301 to 500	-	101 to 200 / 301 to 500 / 501 to 1000
Max. Thrust Force(N)	49 ～ 637	30 ～ 1058	24 ～ 196	131 ～ 3343	131 ～ 736	27 ～ 90	49 ～ 245	30 ～ 1058	131 ～ 736	7.5 ～ 180	10 ～ 50	131 ～ 3343	98 ～ 588	49 ～ 245	521 ～ 3343	7.5 ～ 180	10 ～ 50	-	98 ～ 588	25 ～ 400	45 ～ 150	2.5 ～ 6	147 ～ 833	98 ～ 196	131 ～ 736	196 ～ 588	36 ～ 120	49 ～ 245	98 ～ 294	75 ～ 100	147 ～ 833	29.4 ～ 49	84 ～ 283	150 ～ 600	250 ～ 900	58.8 ～ 107.8	98 ～ 196	131 ～ 736	88.2 ～ 637	43 ～ 400	45 ～ 150	36 ～ 120	339	-	131 ～ 736
Noise Filters	Not Provided / Provided	Not Provided	Not Provided	Not Provided	Not Provided	-	Not Provided	Not Provided	Not Provided	Not Provided	Not Provided	Not Provided	Not Provided	Not Provided	Not Provided	Not Provided	Not Provided	Not Provided	Not Provided	Not Provided	-	Not Provided	Not Provided	Not Provided	Not Provided	Not Provided	-	Not Provided	Not Provided	-	Not Provided	Not Provided	Not Provided / Provided	-	-	Not Provided	Not Provided	Not Provided	Not Provided	Not Provided	-	-	-	-	Not Provided
Table Length L1(mm)	72 ～ 170	-	-	-	-	70	102 ～ 170	-	-	111 ～ 285	76.4 ～ 113.2	-	102 ～ 170	102 ～ 170	-	88.5 ～ 316.5	-	72 ～ 122	102 ～ 170	-	58	60 ～ 150	160 ～ 172	70 ～ 100	-	102 ～ 170	90	102 ～ 170	160 ～ 172	-	160 ～ 172	64 ～ 82	78	-	-	78	70 ～ 100	-	72 ～ 170	72 ～ 108	58	90	90	90	-
Usage Environment	Standard	Standard	Standard	Dust Resistant	Standard	Standard	Standard	Standard	Standard	Standard / Dust Resistant	Standard	Dust Resistant	Standard	Standard	Dust Resistant	Standard / Dust Resistant	Standard	Standard	Standard	Standard	Standard	Standard	Standard	Standard	Dust Resistant	Standard	Standard	Standard	Standard	Standard	Standard	Standard	Standard	Standard	Standard	Standard	Standard	Standard	Standard	Standard	Standard	Standard	Standard	-	Standard
Positioning Repeatability(µm)	±15 ～ ±20	±20	-	±10 ～ ±20	±10 ～ ±20	±20	±60	±20	±10 ～ ±20	±50	±50	±10 ～ ±20	±10 ～ ±20	±60	±10 ～ ±20	±50	±50	±80	±10 ～ ±20	-	±20	±5 ～ ±90	±10 ～ ±20	±80	±20	±20	±20	±60	±40	±20	±10 ～ ±20	±80	±20	±20	±20	±80	±80	±10 ～ ±20	±15 ～ ±20	-	±20	±20	±10	±40	±20
Maximum Velocity(mm/sec)	1,000 ～ 1100	75 ～ 500	33 ～ 200	1,000 ～ 1000	1,000 ～ 900	300 ～ 1000	2000	75 ～ 500	1,000 ～ 1000	150 ～ 400	150 ～ 350	1,000 ～ 900	1,000 ～ 1500	2000	1,000 ～ 800	200 ～ 400	150 ～ 350	1,500 ～ 2000	1,000 ～ 940	150 ～ 600	100 ～ 600	400	1,200 ～ 1800	1,000	1,000 ～ 900	1,000 ～ 940	300 ～ 1000	2000	2000 ～ 3000	250 ～ 500	1,200 ～ 1800	1,000 ～ 500	360 ～ 1200	80 ～ 500	50 ～ 300	1,000	2000	1,000 ～ 900	250 ～ 500	180 ～ 800	100 ～ 600	300 ～ 1000	1800	1875	1,000 ～ 900

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Main Body, Peripheral Components
- Main Body
- Peripheral Components
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Type
- Sliders
- Rods
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Stroke(mm)
1,000

1,100

1,200

1,500

1,800

2,000

10

15

20

25

30

40

50

60

70

75

80

100

120

125

150

200

250

300

350

400

450

500

550

600

650

700

750

800

850

900

950

1000

1050

1100

1150

1200

1250

1300

1350

1400

1450

1500

1550

1600

1650

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2150

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2350

2400

2450

2500

2550

2600

2650

2700

2750

2800

2850

2900

2950

3000

3050
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Max. Transportable Mass Range (Horizontal)(kg)
- 0 to 2.0
- 2.1 to 5.0
- 5.1 to 10.0
- 10.1 to 20.0
- 20.1 to 50.0
- 50.1 to 100.0
- 150.1 or Higher
The calculation method differs depending on the manufacturer. For details, see the technical data provided by the relevant manufacturer.

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Max. Transportable Mass (Horizontal)(kg)
0.75

1

1.5

2

2.4

2.5

3

4

4.4

5

6

7

7.3

7.5

8

8.2

9

10

11

11.9

12

14

15

17

18

19

20

23

25

30

35

40

45

50

55

60

65

70

80

85

90

200
The calculation method differs depending on the manufacturer. For details, see the technical data provided by the relevant manufacturer.
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Max. Transportable Mass Range (Vertical)(kg)
- 0 to 2.0
- 2.1 to 5.0
- 5.1 to 10.0
- 10.1 to 20.0
- 20.1 to 50.0
- 50.1 to 100.0
- 100.1 or Higher
The calculation method differs depending on the manufacturer. For details, see the technical data provided by the relevant manufacturer.

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Max. Transportable Mass (Vertical)(kg)
0.05

0.1

0.25

0.5

1

1.5

2

2.5

3

3.5

4

4.5

5

6

7

7.5

8

8.5

9

10

11

12

12.5

13

14

15

16

17

18.5

19

20

21

22

23

24

25

27

28.5

29

30

35

37

38

41

42

43

44

46

50

51

53

72

115

Not vertical
The calculation method differs depending on the manufacturer. For details, see the technical data provided by the relevant manufacturer.
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Drive Method
- Rolled Ball Screw
- Belts
- Slide Screws
- Linear Motor
Images

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Guide
- Not Provided
- Provided
Images

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Lead(mm)
2

2.5

2.86

3

4

5

6

8

10

12

16

20

24

25 Equivalent

27

30

42

48

Equivalent to 48

54 equivalent
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Input Power Supply
24 V DC

24/48 V DC

Single-Phase, 100 to 115 V AC

Single-Phase, 100 to 120 V AC

Single-Phase, 200 to 230 V AC

Three-Phase, 200 to 230 V AC

Single-Phase, 200 to 240 V AC
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Position Detection
- Incremental
- Absolute
Details

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I/O Module
- NPN
- PNP
- CC-Link
- DeviceNet
- Ethernet
- Not Provided
- EtherCAT
- IO-Link
- PROFINET
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Table Width W1(mm)
19

24

25

32

32.2

36

39.4

40.2

41

45

47

49

50

50.4

52

54

56

60

61

64

71.7

72.4

74

80

87

87.4

94

100

105

108.7

110

124.7

129

135

146
Drawing

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Brake
- Not Provided
- Provided
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Max. Thrust Force Range(N)
- 0 to 100
- 101 to 200
- 201 to 300
- 301 to 500
- 501 to 1000
- 1,001 or More
The calculation method differs depending on the manufacturer. For details, see the technical data provided by the relevant manufacturer.

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Max. Thrust Force(N)
2.5

5.2

5.5

6

7.5

10

11

15

20

24

25

27

29.4

30

35

36

38

40

43

45

49

50

55

56

58

58.8

60

62

68.6

70

72

74

75

80

84

86

88.2

90

98

100

107.8

111

117

117.6

120

122

125

130

131

137.2

140

141

147

150

157

169

176.4

180

189

196

197

200

238

245

250

255

283

294

300

308

339

360

370

385

392

400

441

452

485

490

500

521

539

550

553

588

600

637

707

736

833

900

1012

1058

1910

3343
The calculation method differs depending on the manufacturer. For details, see the technical data provided by the relevant manufacturer.
Clear

Noise Filters
- Not Provided
- Provided
Clear

Table Length L1(mm)
45

58

60

64

65

70

72

76.4

78

80

82

86

88.2

88.5

88.7

90

100

102

102.3

102.5

107.4

108

111

113.2

116.5

120

122

130.3

130.5

131.5

131.7

133.5

137

143

150

154

156.5

156.7

159.5

160

170

172

174.3

174.5

191.5

193.5

199.3

199.5

207

266.5

285

291.5

316.5
Drawing

Clear

Usage Environment
- Standard
- Dust Resistant
Clear

Positioning Repeatability(µm)
±5

±10

±15

±20

±40

±50

±60

±80

±90
Clear

Maximum Velocity(mm/sec)
1,000

1,140

1,200

1,410

1,500

3,000

33

50

70

75

80

100

125

130

150

160

170

175

180

190

200

210

220

225

230

240

250

260

270

300

310

320

330

340

350

360

370

380

390

400

410

420

440

450

460

470

480

500

510

520

540

550

570

580

600

610

620

630

640

650

660

700

720

740

750

760

780

800

900

910

930

940

1000

1050

1100

1110

1170

1200

1390

1400

1500

1580

1800

1875

2000

3000
Clear