Single Axis Robots(Max. Thrust Force Range:101 to 200)

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Brand
Product Series
CAD
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Min. Shipping Days
Main Body, Peripheral Components
Type
Stroke(mm)
Max. Transportable Mass Range (Horizontal)(kg)
Max. Transportable Mass (Horizontal)(kg)
Max. Transportable Mass Range (Vertical)(kg)
Max. Transportable Mass (Vertical)(kg)
Drive Method
Guide
Lead(mm)
Input Power Supply
Position Detection
I/O Module
Table Width W1(mm)
Brake
Max. Thrust Force Range(N)
Max. Thrust Force(N)
Noise Filters
Table Length L1(mm)
Usage Environment
Positioning Repeatability(µm)
Maximum Velocity(mm/sec)

    Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

      Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

        Electric actuator rod type motorless specification LEY series

          Single Axis Robots RS1 / Linear

            Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

              Electric cylinder LZB series

                Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                  Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                    Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                      Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                        Single Axis Robots RS3 / Linear

                          Electric actuator slider type belt drive motorless specification LEFB series

                            Single Axis Robot RSH3

                              Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                                Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                  Electric Slide Table, Compact Type LES Series

                                    Electric actuator rod type with guide motorless specification LEYG series

                                      Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                                        Electric Actuator, Low Profile Slider Type, Linear Guide 1-Axis/2-Axis, LEMH/LEMHT Series

                                          Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series

                                            Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                                              Electric slide table high rigidity type LESH series

                                                Single Axis Robot RSH1

                                                  Single Axis Robots RS1 / Motor Wrap

                                                    Electric cylinder LZC series

                                                      Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                                        Electric actuator rod type LEY series AC servo motor LECS□

                                                          Electric actuator rod type LEY series AC servo motor LECY□

                                                            Electric actuator guided rod type LEYG series AC servo motor LECS□

                                                              Single Axis Robots RSD2 / Rod Type

                                                                Rod Type with Support Guide

                                                                  Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECY□

                                                                    Electric Cylinder, EAC Series

                                                                      Single Axis Robot RSH2

                                                                        Single Axis Robots RS3 Motor Wrap

                                                                          Electric actuator slider type ball screw drive LEFS series AC servo motor LECY□

                                                                            Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                                                              Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                                                Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

                                                                                  Electric actuator rod type with guide LEYG series AC servo motor LECY□

                                                                                    Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                                                                                      Electric Slider, EAS Series

                                                                                        Electric Slider, EZS Series

                                                                                        Brand

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        MISUMI

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        MISUMI

                                                                                        SMC

                                                                                        MISUMI

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        MISUMI

                                                                                        MISUMI

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        MISUMI

                                                                                        MISUMI

                                                                                        SMC

                                                                                        ORIENTAL MOTOR

                                                                                        MISUMI

                                                                                        MISUMI

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        ORIENTAL MOTOR

                                                                                        ORIENTAL MOTOR

                                                                                        Product Series

                                                                                        Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

                                                                                        Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

                                                                                        Electric actuator rod type motorless specification LEY series

                                                                                        Single Axis Robots RS1 / Linear

                                                                                        Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

                                                                                        Electric cylinder LZB series

                                                                                        Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                                                                                        Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                                                                                        Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                                                                                        Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                                                                                        Single Axis Robots RS3 / Linear

                                                                                        Electric actuator slider type belt drive motorless specification LEFB series

                                                                                        Single Axis Robot RSH3

                                                                                        Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                                                                                        Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                                                                        Electric Slide Table, Compact Type LES Series

                                                                                        Electric actuator rod type with guide motorless specification LEYG series

                                                                                        Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                                                                                        Electric Actuator, Low Profile Slider Type, Linear Guide 1-Axis/2-Axis, LEMH/LEMHT Series

                                                                                        Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series

                                                                                        Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                                                                                        Electric slide table high rigidity type LESH series

                                                                                        Single Axis Robot RSH1

                                                                                        Single Axis Robots RS1 / Motor Wrap

                                                                                        Electric cylinder LZC series

                                                                                        Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                                                                        Electric actuator rod type LEY series AC servo motor LECS□

                                                                                        Electric actuator rod type LEY series AC servo motor LECY□

                                                                                        Electric actuator guided rod type LEYG series AC servo motor LECS□

                                                                                        Single Axis Robots RSD2 / Rod Type

                                                                                        Rod Type with Support Guide

                                                                                        Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECY□

                                                                                        Electric Cylinder, EAC Series

                                                                                        Single Axis Robot RSH2

                                                                                        Single Axis Robots RS3 Motor Wrap

                                                                                        Electric actuator slider type ball screw drive LEFS series AC servo motor LECY□

                                                                                        Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                                                                        Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                                                        Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

                                                                                        Electric actuator rod type with guide LEYG series AC servo motor LECY□

                                                                                        Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                                                                                        Electric Slider, EAS Series

                                                                                        Electric Slider, EZS Series

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                                                                                        Starting from

                                                                                        1,357.93 €

                                                                                        *Unit price with basic configuration

                                                                                        595.53 €

                                                                                        *Unit price with basic configuration

                                                                                        560.14 €

                                                                                        *Unit price with basic configuration

                                                                                        -

                                                                                        968.29 €

                                                                                        *Unit price with basic configuration

                                                                                        495.89 €

                                                                                        *Unit price with basic configuration

                                                                                        760.19 €

                                                                                        *Unit price with basic configuration

                                                                                        2,145.69 €

                                                                                        *Unit price with basic configuration

                                                                                        2,028.77 €

                                                                                        *Unit price with basic configuration

                                                                                        1,432.34 €

                                                                                        *Unit price with basic configuration

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                                                                                        1,485.56 €

                                                                                        *Unit price with basic configuration

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                                                                                        2,232.19 €

                                                                                        *Unit price with basic configuration

                                                                                        1,091.16 €

                                                                                        *Unit price with basic configuration

                                                                                        871.80 €

                                                                                        *Unit price with basic configuration

                                                                                        768.09 €

                                                                                        *Unit price with basic configuration

                                                                                        688.44 €

                                                                                        *Unit price with basic configuration

                                                                                        1,567.53 €

                                                                                        *Unit price with basic configuration

                                                                                        1,065.37 €

                                                                                        *Unit price with basic configuration

                                                                                        1,296.96 €

                                                                                        *Unit price with basic configuration

                                                                                        927.37 €

                                                                                        *Unit price with basic configuration

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                                                                                        -

                                                                                        546.19 €

                                                                                        *Unit price with basic configuration

                                                                                        2,814.41 €

                                                                                        *Unit price with basic configuration

                                                                                        1,000.57 €

                                                                                        *Unit price with basic configuration

                                                                                        1,181.27 €

                                                                                        *Unit price with basic configuration

                                                                                        1,213.06 €

                                                                                        *Unit price with basic configuration

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                                                                                        2,392.26 €

                                                                                        *Unit price with basic configuration

                                                                                        569.50 €

                                                                                        *Unit price with basic configuration

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                                                                                        1,513.19 €

                                                                                        *Unit price with basic configuration

                                                                                        2,602.01 €

                                                                                        *Unit price with basic configuration

                                                                                        2,841.41 €

                                                                                        *Unit price with basic configuration

                                                                                        1,282.18 €

                                                                                        *Unit price with basic configuration

                                                                                        1,570.63 €

                                                                                        *Unit price with basic configuration

                                                                                        1,348.27 €

                                                                                        *Unit price with basic configuration

                                                                                        666.18 €

                                                                                        *Unit price with basic configuration

                                                                                        668.67 €

                                                                                        *Unit price with basic configuration

                                                                                        Min. Shipping Days 7 Days 7 Days 9 Days 22 Days 9 Days 26 Days 7 Days 26 Days 26 Days 26 Days 22 Days 26 Days 19 Days 26 Days 26 Days 26 Days 9 Days 26 Days 26 Days 26 Days 26 Days 26 Days 19 Days 22 Days 26 Days 26 Days 26 Days 26 Days 26 Days 22 Days 22 Days 26 Days 19 Days 19 Days 22 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 19 Days 19 Days
                                                                                        Main Body, Peripheral ComponentsMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain Body
                                                                                        TypeSlidersRodsRodsSlidersSlidersRodsRodsSlidersSlidersSlidersSlidersSlidersSlidersSlidersSlidersSlidersRodsSlidersSlidersRodsRodsSlidersSlidersSlidersRodsSlidersRodsRodsRodsRodsRodsSlidersSlidersSlidersSlidersSlidersSlidersSlidersSlidersRodsSlidersSlidersSliders
                                                                                        Stroke(mm)1,000 ~ 95030 ~ 50030 ~ 50050 ~ 40050 ~ 80025 ~ 20030 ~ 3001,000 ~ 9001,000 ~ 250050 ~ 75050 ~ 8001,000 ~ 2500150 ~ 10501,000 ~ 90050 ~ 60030 ~ 15030 ~ 3001,000 ~ 17001,000 ~ 140030 ~ 50050 ~ 40050 ~ 150150 ~ 80050 ~ 40025 ~ 2001,200 ~ 80030 ~ 50030 ~ 50030 ~ 30050 ~ 30050 ~ 3001,000 ~ 80050 ~ 250150 ~ 105050 ~ 80050 ~ 7001,000 ~ 2500200 ~ 4001,000 ~ 170050 ~ 300100 ~ 50050 ~ 850150 ~ 800
                                                                                        Max. Transportable Mass Range (Horizontal)(kg)10.1 to 20.010.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.05.1 to 10.010.1 to 20.010.1 to 20.010.1 to 20.0 / 20.1 to 50.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.050.1 to 100.010.1 to 20.010.1 to 20.0 / 20.1 to 50.02.1 to 5.010.1 to 20.0 / 20.1 to 50.010.1 to 20.010.1 to 20.020.1 to 50.010.1 to 20.0 / 20.1 to 50.010.1 to 20.010.1 to 20.05.1 to 10.010.1 to 20.010.1 to 20.010.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.020.1 to 50.020.1 to 50.010.1 to 20.020.1 to 50.020.1 to 50.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.0 / 20.1 to 50.010.1 to 20.020.1 to 50.020.1 to 50.0
                                                                                        Max. Transportable Mass (Horizontal)(kg)11 ~ 2012 ~ 4018 ~ 3062011.9 ~ 2012 ~ 401515201215602011 ~ 30518 ~ 30112030 ~ 4018 ~ 301220611.9 ~ 201518 ~ 3018 ~ 3018 ~ 302525 ~ 4020-40122015152018 ~ 6020--
                                                                                        Max. Transportable Mass Range (Vertical)(kg)0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.02.1 to 5.05.1 to 10.0 / 10.1 to 20.0-5.1 to 10.0 / 10.1 to 20.02.1 to 5.0-5.1 to 10.0 / 10.1 to 20.02.1 to 5.0---0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.02.1 to 5.05.1 to 10.0--5.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.02.1 to 5.02.1 to 5.02.1 to 5.0-2.1 to 5.05.1 to 10.0 / 10.1 to 20.05.1 to 10.05.1 to 10.02.1 to 5.02.1 to 5.0-10.1 to 20.05.1 to 10.02.1 to 5.05.1 to 10.0 / 10.1 to 20.0-2.1 to 5.0-5.1 to 10.05.1 to 10.0 / 10.1 to 20.010.1 to 20.010.1 to 20.0
                                                                                        Max. Transportable Mass (Vertical)(kg)0.5 ~ 158 ~ 128 ~ 1248 ~ 15-7 ~ 113-8 ~ 154---2 ~ 1557 ~ 10--7 ~ 118 ~ 12444-38 ~ 128 ~ 97 ~ 1054 ~ 11-14848 ~ 15-3-7 ~ 178 ~ 151412.5
                                                                                        Drive MethodRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewSlide ScrewsRolled Ball ScrewRolled Ball ScrewBeltsRolled Ball ScrewRolled Ball ScrewBeltsRolled Ball ScrewBeltsRolled Ball ScrewSlide ScrewsRolled Ball ScrewBeltsBeltsRolled Ball ScrewRolled Ball ScrewSlide ScrewsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsRolled Ball ScrewBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball Screw
                                                                                        GuideProvidedNot ProvidedProvided-ProvidedNot ProvidedProvidedProvidedProvidedProvided-Provided-ProvidedProvidedProvidedProvidedProvidedProvidedNot ProvidedNot ProvidedProvided--Not ProvidedProvidedNot ProvidedNot ProvidedProvidedNot ProvidedProvidedProvidedNot Provided / Provided--ProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvided
                                                                                        Lead(mm)5 ~ 302.5 ~ 1612 ~ 2026 ~ 122 ~ 62.5 ~ 162454 equivalent6 ~ 12654 equivalent10275 ~ 12812 ~ 20Equivalent to 48Equivalent to 483 ~ 1612 ~ 2081222 ~ 62412 ~ 2012 ~ 2012 ~ 20126 ~ 1227-1066 ~ 1254 equivalent24Equivalent to 4810 ~ 126 ~ 12--
                                                                                        Input Power Supply24 V DC24 V DC-24 V DC-24 V DC24 V DC---24 V DC-Single-Phase, 200 to 230 V AC-24 V DC24 V DC-24 V DC24 V DC24 V DC-24 V DCSingle-Phase, 200 to 230 V AC24 V DC24 V DC----24 V DC24 V DC-24/48 V DC ~ Single-Phase, 200 to 240 V ACSingle-Phase, 200 to 230 V AC24 V DC---24 V DC--24/48 V DC ~ Single-Phase, 200 to 240 V AC24/48 V DC ~ Single-Phase, 200 to 230 V AC
                                                                                        Position DetectionIncrementalIncremental-IncrementalIncremental-Incremental-Incremental / AbsoluteIncremental / AbsoluteIncremental-Incremental / AbsoluteIncremental / AbsoluteIncrementalIncremental-IncrementalIncrementalIncrementalIncremental / AbsoluteIncrementalIncremental / AbsoluteIncremental-Incremental / AbsoluteIncremental / AbsoluteAbsoluteIncremental / AbsoluteIncrementalIncrementalAbsoluteAbsoluteIncremental / AbsoluteIncrementalAbsoluteAbsoluteAbsoluteIncrementalAbsoluteIncremental / AbsoluteAbsoluteAbsolute
                                                                                        I/O ModuleNPN / PNP / DeviceNet / Ethernet / EtherCAT / IO-Link / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET-NPN / PNP / CC-Link / DeviceNet-PNP / Not ProvidedNPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET---NPN / PNP / CC-Link / DeviceNet-NPN / PNP / CC-Link / DeviceNet-NPN / PNP / Ethernet / Not Provided / PROFINETNPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET-NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETPNP / Ethernet / Not Provided-NPN / PNP / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINETNPN / PNP / CC-Link / DeviceNet-PNP / Not Provided----NPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNet-Not ProvidedNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNet---NPN / PNP / Ethernet / Not Provided / PROFINET--Not ProvidedNot Provided
                                                                                        Table Width W1(mm)39.4 ~ 74--4150--105605052608010539.4 ~ 5060-6171.7 ~ 124.7--618041-105-----105-80525060105108.7-5036 ~ 87-
                                                                                        BrakeNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / Provided
                                                                                        Max. Thrust Force Range(N)101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200
                                                                                        Max. Thrust Force(N)107.8 ~ 196111 ~ 189131 ~ 197150196117 ~ 196111 ~ 189147147196120147169196107.8 ~ 294180131 ~ 197107.8196122 ~ 189131 ~ 197180141150117 ~ 196147131 ~ 197131 ~ 157131 ~ 197150150 ~ 300196125 ~ 200169120196147147196131 ~ 308196125 ~ 200125 ~ 200
                                                                                        Noise FiltersNot Provided / ProvidedNot ProvidedNot Provided-Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided-Not ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided / Provided-Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided--Not ProvidedNot ProvidedNot Provided / Provided-Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided
                                                                                        Table Length L1(mm)72 ~ 170--58102--1601221029012215416072 ~ 102133.5 ~ 316.5-78100--143 ~ 2857858-160-----160-7890102122160100-10265 ~ 8072 ~ 108
                                                                                        Usage EnvironmentStandardStandardDust ResistantStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandard / Dust ResistantStandardStandardStandardStandard / Dust ResistantDust ResistantStandard / Dust ResistantStandardStandardStandardStandardStandardDust ResistantStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandard
                                                                                        Positioning Repeatability(µm)±15 ~ ±20±20±10 ~ ±20±20±10 ~ ±20-±20±10 ~ ±20±60±10 ~ ±20±20±60±10±40±15 ~ ±20±50±10 ~ ±20±80±80±20±20±50±20±20-±10 ~ ±20±20±10 ~ ±20±10 ~ ±20±20±20±40-±10±20±10 ~ ±20±60±20±80±20±20--
                                                                                        Maximum Velocity(mm/sec)1,200 ~ 1100125 ~ 5001,000 ~ 1000100270 ~ 90033 ~ 100125 ~ 500410 ~ 180020001,500 ~ 90030020006002000250 ~ 5002001,000 ~ 9001,0002000100 ~ 4001,000 ~ 90015072010033 ~ 100410 ~ 18001,000 ~ 10001,200 ~ 9001,000 ~ 900500250 ~ 5002000300 ~ 600600300360 ~ 900200018001,0001,000 ~ 900360 ~ 900270 ~ 800300 ~ 800

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