Single Axis Robots(Page 2)

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Main Body, Peripheral Components
Type
Stroke(mm)
Max. Transportable Mass Range (Horizontal)(kg)
Max. Transportable Mass (Horizontal)(kg)
Max. Transportable Mass Range (Vertical)(kg)
Max. Transportable Mass (Vertical)(kg)
Drive Method
Guide
Lead(mm)
Input Power Supply
Position Detection
I/O Module
Table Width W1(mm)
Brake
Max. Thrust Force Range(N)
Max. Thrust Force(N)
Noise Filters
Table Length L1(mm)
Usage Environment
Positioning Repeatability(µm)
Maximum Velocity(mm/sec)

    Handset Terminals for Single Axis Robots RS Series

      Single Axis Robots RSD1 / Rod Type

        Rod Type with Support Guide

          Single Axis Robots RSF4 / Linear / Narrow Type

            AC Servo Motor Driver, Absolute Type LECSS-T Series

              Electric cylinder LZC series

                4-axis step motor controller JXC73 / 83/93 series

                  Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                    Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                      Electric actuator rod type with guide LEYG series AC servo motor LECY□

                        Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                          Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                            AC servo motor driver absolute type LECYM / LECYU series

                              Single Axis Robots RS3 Motor Wrap

                                Single Axis Robots RSD3 / Rod Type

                                  Single Axis Robots RSH4 / Linear

                                    Single Axis Robots RSB2 / Belt Type

                                      3-axis step motor controller JXC92 series

                                        Electric actuator slider type ball screw drive LEFS series AC servo motor LECY□

                                          Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                            Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECY□

                                              Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series

                                                Electric Actuator, High Stiffness Slider Type, Ball Screw Drive, 11-LEJS Series, LECS□

                                                  Electric Actuator, Guide Rod Slider, Belt Drive, LEL Series

                                                    Electric Actuator, Miniature Rod Type, LEPY Series

                                                      Electric Actuator, Miniature Slide Table Type, LEPS Series

                                                        Electric Actuator, Slider Type, Ball Screw Drive, LEFS Series

                                                          Compact Electric Cylinder, DRS2 Series

                                                            Single Axis Robot RSH1

                                                              Single Axis Robot RSH2

                                                                Single Axis Robot RSH3

                                                                  RSDG1 Series Rod Type Dedicated Feet and Flanges

                                                                    Single Axis Robot RSH1 / 2 / 3 Series Controller

                                                                      I / O Cables for Single Axis Robot RS / RSH / RSF / RSB Series

                                                                        Support Software for Single Axis Robot RS Series

                                                                          Power / Signal-Integrated Cables for Single Axis Robot Controllers EXRS-CT

                                                                            Power Cables for Single Axis Robot Controllers EXRS-C21 / C22

                                                                              Noise Filters for Single Axis Robots RS Series

                                                                                Pulse Train Type Controllers dedicated for Single Axis Robots

                                                                                  Single Axis Robots RS2 / Motor Wrap

                                                                                    Rod Type with Support Guide

                                                                                      Daisy-Chain Connection Cables for Single Axis Robots

                                                                                        Electric actuator support guide ball screw drive LEFG series

                                                                                          Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                                                            Electric Actuator, Low Profile Slider Type, Linear Guide 1-Axis/2-Axis, LEMH/LEMHT Series

                                                                                            Brand

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            SMC

                                                                                            SMC

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                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            ORIENTAL MOTOR

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            MISUMI

                                                                                            SMC

                                                                                            SMC

                                                                                            SMC

                                                                                            Product Series

                                                                                            Handset Terminals for Single Axis Robots RS Series

                                                                                            Single Axis Robots RSD1 / Rod Type

                                                                                            Rod Type with Support Guide

                                                                                            Single Axis Robots RSF4 / Linear / Narrow Type

                                                                                            AC Servo Motor Driver, Absolute Type LECSS-T Series

                                                                                            Electric cylinder LZC series

                                                                                            4-axis step motor controller JXC73 / 83/93 series

                                                                                            Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                                                                                            Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                                                                                            Electric actuator rod type with guide LEYG series AC servo motor LECY□

                                                                                            Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                                                                            Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                                                                                            AC servo motor driver absolute type LECYM / LECYU series

                                                                                            Single Axis Robots RS3 Motor Wrap

                                                                                            Single Axis Robots RSD3 / Rod Type

                                                                                            Single Axis Robots RSH4 / Linear

                                                                                            Single Axis Robots RSB2 / Belt Type

                                                                                            3-axis step motor controller JXC92 series

                                                                                            Electric actuator slider type ball screw drive LEFS series AC servo motor LECY□

                                                                                            Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                                                                            Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECY□

                                                                                            Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series

                                                                                            Electric Actuator, High Stiffness Slider Type, Ball Screw Drive, 11-LEJS Series, LECS□

                                                                                            Electric Actuator, Guide Rod Slider, Belt Drive, LEL Series

                                                                                            Electric Actuator, Miniature Rod Type, LEPY Series

                                                                                            Electric Actuator, Miniature Slide Table Type, LEPS Series

                                                                                            Electric Actuator, Slider Type, Ball Screw Drive, LEFS Series

                                                                                            Compact Electric Cylinder, DRS2 Series

                                                                                            Single Axis Robot RSH1

                                                                                            Single Axis Robot RSH2

                                                                                            Single Axis Robot RSH3

                                                                                            RSDG1 Series Rod Type Dedicated Feet and Flanges

                                                                                            Single Axis Robot RSH1 / 2 / 3 Series Controller

                                                                                            I / O Cables for Single Axis Robot RS / RSH / RSF / RSB Series

                                                                                            Support Software for Single Axis Robot RS Series

                                                                                            Power / Signal-Integrated Cables for Single Axis Robot Controllers EXRS-CT

                                                                                            Power Cables for Single Axis Robot Controllers EXRS-C21 / C22

                                                                                            Noise Filters for Single Axis Robots RS Series

                                                                                            Pulse Train Type Controllers dedicated for Single Axis Robots

                                                                                            Single Axis Robots RS2 / Motor Wrap

                                                                                            Rod Type with Support Guide

                                                                                            Daisy-Chain Connection Cables for Single Axis Robots

                                                                                            Electric actuator support guide ball screw drive LEFG series

                                                                                            Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                                                            Electric Actuator, Low Profile Slider Type, Linear Guide 1-Axis/2-Axis, LEMH/LEMHT Series

                                                                                            CAD
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                                                                                            Starting from

                                                                                            444.57 €

                                                                                            *Unit price with basic configuration

                                                                                            Volume Discount

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                                                                                            -

                                                                                            1,124.51 €

                                                                                            *Unit price with basic configuration

                                                                                            380.90 €

                                                                                            *Unit price with basic configuration

                                                                                            12.15 €

                                                                                            *Unit price with basic configuration

                                                                                            679.23 €

                                                                                            *Unit price with basic configuration

                                                                                            1,128.06 €

                                                                                            *Unit price with basic configuration

                                                                                            1,570.63 €

                                                                                            *Unit price with basic configuration

                                                                                            918.92 €

                                                                                            *Unit price with basic configuration

                                                                                            1,348.27 €

                                                                                            *Unit price with basic configuration

                                                                                            17.32 €

                                                                                            *Unit price with basic configuration

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                                                                                            -

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                                                                                            -

                                                                                            1,682.18 €

                                                                                            *Unit price with basic configuration

                                                                                            1,513.19 €

                                                                                            *Unit price with basic configuration

                                                                                            2,562.24 €

                                                                                            *Unit price with basic configuration

                                                                                            2,392.26 €

                                                                                            *Unit price with basic configuration

                                                                                            1,065.37 €

                                                                                            *Unit price with basic configuration

                                                                                            2,538.34 €

                                                                                            *Unit price with basic configuration

                                                                                            1,008.61 €

                                                                                            *Unit price with basic configuration

                                                                                            944.54 €

                                                                                            *Unit price with basic configuration

                                                                                            1,049.43 €

                                                                                            *Unit price with basic configuration

                                                                                            1,545.03 €

                                                                                            *Unit price with basic configuration

                                                                                            864.43 €

                                                                                            *Unit price with basic configuration

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                                                                                            -

                                                                                            36.52 €

                                                                                            *Unit price with basic configuration

                                                                                            Volume Discount

                                                                                            630.96 €

                                                                                            *Unit price with basic configuration

                                                                                            Volume Discount

                                                                                            39.04 €

                                                                                            *Unit price with basic configuration

                                                                                            Volume Discount

                                                                                            198.99 €

                                                                                            *Unit price with basic configuration

                                                                                            Volume Discount

                                                                                            81.87 €

                                                                                            *Unit price with basic configuration

                                                                                            Volume Discount

                                                                                            57.93 €

                                                                                            *Unit price with basic configuration

                                                                                            Volume Discount

                                                                                            54.16 €

                                                                                            *Unit price with basic configuration

                                                                                            Volume Discount

                                                                                            175.06 €

                                                                                            *Unit price with basic configuration

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                                                                                            -

                                                                                            52.90 €

                                                                                            *Unit price with basic configuration

                                                                                            Volume Discount

                                                                                            315.13 €

                                                                                            *Unit price with basic configuration

                                                                                            2,740.10 €

                                                                                            *Unit price with basic configuration

                                                                                            1,319.73 €

                                                                                            *Unit price with basic configuration

                                                                                            Min. Shipping Days 8 Days 14 Days 14 Days 19 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 14 Days 14 Days 19 Days 19 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 4 Days 4 Days 4 Days 4 Days 18 Days 19 Days 19 Days 19 Days 8 Days 19 Days 8 Days 8 Days 8 Days 8 Days 8 Days 8 Days 14 Days 14 Days 8 Days 7 Days 26 Days 26 Days
                                                                                            Main Body, Peripheral ComponentsPeripheral ComponentsMain BodyMain BodyMain BodyPeripheral ComponentsMain BodyPeripheral ComponentsMain BodyMain BodyMain BodyMain BodyMain BodyPeripheral ComponentsMain BodyMain BodyMain BodyMain BodyPeripheral ComponentsMain BodyMain BodyMain BodyMain BodyMain Body----Main BodyMain BodyMain BodyMain BodyPeripheral ComponentsPeripheral ComponentsPeripheral ComponentsPeripheral ComponentsPeripheral ComponentsPeripheral ComponentsPeripheral ComponentsPeripheral ComponentsMain BodyMain BodyPeripheral ComponentsPeripheral ComponentsMain BodyMain Body
                                                                                            Type-RodsRodsSliders-Rods-SlidersRodsRodsSlidersSliders-SlidersRodsSlidersSliders-SlidersSlidersSlidersRodsSliders----RodsSlidersSlidersSliders--------SlidersRods--SlidersSliders
                                                                                            Stroke(mm)-50 ~ 20050 ~ 200150 ~ 1050-25 ~ 200-1,000 ~ 170030 ~ 50050 ~ 3001,000 ~ 8501,000 ~ 900-50 ~ 80050 ~ 300150 ~ 1050150 ~ 3050-1,000 ~ 9001,000 ~ 9001,000 ~ 300030 ~ 5001,000 ~ 800300 ~ 100025 ~ 5025 ~ 50100 ~ 100050150 ~ 800150 ~ 1050150 ~ 1050--------50 ~ 80050 ~ 300--1,000 ~ 9001,000 ~ 1400
                                                                                            Max. Transportable Mass Range (Horizontal)(kg)-5.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0-2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0-5.1 to 10.0 / 10.1 to 20.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0-5.1 to 10.0 / 10.1 to 20.020.1 to 50.0 / 50.1 to 100.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.010.1 to 20.0-5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.020.1 to 50.0 / 50.1 to 100.0----20.1 to 50.010.1 to 20.0 / 20.1 to 50.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.020.1 to 50.0 / 50.1 to 100.0--------2.1 to 5.0 / 5.1 to 10.020.1 to 50.0--10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.0
                                                                                            Max. Transportable Mass (Horizontal)(kg)-10 ~ 2010 ~ 2015 ~ 80-2.4 ~ 20-6 ~ 1118 ~ 6018 ~ 609 ~ 6520 ~ 60-6 ~ 1250 ~ 6015 ~ 6020-10 ~ 6015 ~ 8510 ~ 307 ~ 8030 ~ 85-----12 ~ 407 ~ 5030 ~ 80--------4 ~ 1025 ~ 45--15 ~ 8510 ~ 20
                                                                                            Max. Transportable Mass Range (Vertical)(kg)-2.1 to 5.0 / 5.1 to 10.02.1 to 5.0 / 5.1 to 10.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0----5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0-0 to 2.0 / 2.1 to 5.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0--2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0-0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0----20.1 to 50.02.1 to 5.0 / 5.1 to 10.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0---------0 to 2.02.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.0--2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0-
                                                                                            Max. Transportable Mass (Vertical)(kg)-4 ~ 83.5 ~ 7.54 ~ 20----8 ~ 467 ~ 442 ~ 238 ~ 30-2 ~ 410 ~ 304 ~ 20--4 ~ 303 ~ 20-2 ~ 425 ~ 20----504 ~ 84 ~ 16---------1 ~ 24 ~ 24--3 ~ 20-
                                                                                            Drive Method-Rolled Ball ScrewRolled Ball ScrewRolled Ball Screw-Rolled Ball Screw-BeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball Screw-Rolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBelts-Rolled Ball ScrewRolled Ball ScrewBeltsRolled Ball ScrewRolled Ball Screw----Rolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball Screw--------Rolled Ball ScrewRolled Ball Screw--Rolled Ball ScrewBelts
                                                                                            Guide-Not ProvidedProvidedProvided-Not Provided-ProvidedNot ProvidedProvidedProvidedProvided--Not ProvidedProvidedProvided-ProvidedProvidedProvidedNot ProvidedProvided----Not Provided------------Provided--ProvidedProvided
                                                                                            Lead(mm)-6 ~ 126 ~ 125 ~ 30-2 ~ 12-Equivalent to 483 ~ 204 ~ 125 ~ 206 ~ 20-6 ~ 202 ~ 125 ~ 3025 Equivalent-6 ~ 308 ~ 3027 ~ 423 ~ 168 ~ 20-4 ~ 104 ~ 86 ~ 2046 ~ 205 ~ 305 ~ 20--------6 ~ 202 ~ 12--8 ~ 30Equivalent to 48
                                                                                            Input Power Supply-24 V DC24 V DCSingle-Phase, 200 to 230 V ACSingle-Phase, 200 to 240 V AC24 V DC-24 V DC--24 V DC-Three-Phase, 200 to 230 V AC24 V DC24 V DCSingle-Phase, 200 to 230 V ACSingle-Phase, 200 to 230 V AC----24 V DC-----24/48 V DCSingle-Phase, 200 to 230 V ACSingle-Phase, 200 to 230 V ACSingle-Phase, 200 to 230 V AC-Single-Phase, 200 to 230 V AC-----24 V DC24 V DC24 V DC---24 V DC
                                                                                            Position Detection-IncrementalIncrementalIncremental / AbsoluteAbsolute--IncrementalIncremental / AbsoluteAbsoluteIncrementalIncremental / Absolute-IncrementalIncrementalIncremental / AbsoluteIncremental / Absolute-AbsoluteIncremental / AbsoluteAbsoluteIncrementalIncremental / Absolute----AbsoluteIncremental / AbsoluteIncremental / AbsoluteIncremental / Absolute-Incremental / Absolute-----IncrementalIncrementalIncremental--AbsoluteIncremental
                                                                                            I/O Module-NPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNet-NPN / PNP / Not Provided-NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET--NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET--NPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetEthernet---PNP / DeviceNet / Ethernet / Not Provided / PROFINET-----Not ProvidedNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNet-NPN / PNP / CC-Link / DeviceNet------NPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNet---NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET
                                                                                            Table Width W1(mm)---94---61--39.4 ~ 7450 ~ 74-52-110146-50 ~ 74105 ~ 129105 ~ 129-105 ~ 129-----808080--------50---105 ~ 12950.4 ~ 124.7
                                                                                            Brake-Not Provided / ProvidedNot Provided / ProvidedNot Provided / Provided-Not Provided-Not Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / Provided-Not Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided-Not Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / Provided----Not Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided--------Not Provided / ProvidedNot Provided / Provided--Not Provided / ProvidedNot Provided / Provided
                                                                                            Max. Thrust Force Range(N)-0 to 1000 to 100301 to 500-0 to 100 / 101 to 200-0 to 100 / 101 to 200101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000101 to 200 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000101 to 200 / 301 to 500 / 501 to 1000-0 to 100 / 101 to 200201 to 300 / 501 to 1000301 to 500--0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 3000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000201 to 300 / 301 to 500 / 501 to 1000----301 to 5000 to 100 / 101 to 200 / 201 to 3000 to 100 / 101 to 200 / 301 to 5000 to 100 / 101 to 200 / 301 to 500--------0 to 100101 to 200 / 201 to 300 / 501 to 1000--101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200
                                                                                            Max. Thrust Force(N)-75 ~ 10075 ~ 100339-24 ~ 196-58.8 ~ 107.8131 ~ 736131 ~ 73688.2 ~ 637196 ~ 588-36 ~ 120250 ~ 900339--98 ~ 588147 ~ 83398 ~ 29435 ~ 707294 ~ 833----50084 ~ 28356 ~ 33984 ~ 339--------27 ~ 90150 ~ 600--147 ~ 83398 ~ 196
                                                                                            Noise Filters-----Not Provided-Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided------Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided----Not ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / Provided------------Not ProvidedNot Provided
                                                                                            Table Length L1(mm)---90---78--72 ~ 170102 ~ 170-90-8690-102 ~ 170160 ~ 172160 ~ 172-160 ~ 172-----7878154--------70---160 ~ 17270 ~ 100
                                                                                            Usage Environment-StandardStandardStandard-Standard-StandardDust ResistantStandardStandardStandard-StandardStandardStandard--StandardStandardStandardStandard / Dust ResistantStandard----StandardStandardStandardStandard--------StandardStandard--StandardStandard
                                                                                            Positioning Repeatability(µm)-±20±20±10---±80±20±20±15 ~ ±20±20-±20±20±10±40-±10 ~ ±20±10 ~ ±20±40±20±10 ~ ±20-----±20±10±10--------±20±20--±10 ~ ±20±80
                                                                                            Maximum Velocity(mm/sec)-250 ~ 500250 ~ 5001800-33 ~ 200-1,0001,000 ~ 9001,000 ~ 900250 ~ 5001,000 ~ 940-300 ~ 100050 ~ 30018001875-1,000 ~ 9401,200 ~ 18002000 ~ 3000100 ~ 4001,200 ~ 600----50360 ~ 1200300 ~ 1800300 ~ 1200--------300 ~ 100080 ~ 500--1,200 ~ 18002000

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