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?* Information on days to ship and prices
SMC
Starting from∗ : | 280.69 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 221.89 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 402.35 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 12.40 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 10.60 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 747.16 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 279.53 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 10.48 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 8.08 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 37.39 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 237.31 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 345.00 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 29.10 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 807.56 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 152.58 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 372.60 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 27.90 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 338.74 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 225.77 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 317.77 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 297.97 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 16.65 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 11.19 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 508.69 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 24.48 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 279.53 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 17.21 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 296.00 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 11.19 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 18.81 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 321.79 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 126.94 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 351.05 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 648.74 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 221.71 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 1,225.27 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 963.29 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 402.35 € |
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Min. Shipping Days : | 7 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 262.29 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 307.18 € |
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Min. Shipping Days : | 9 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 248.15 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 606.03 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
Starting from∗ : | 1,110.84 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 269.02 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 433.89 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
Brand |
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Product Series |
CAD |
Starting from∗ |
Min. Shipping Days : |
Type |
Stroke(mm) |
Table Material |
Max. Load Mass (Range Selectable)(kg) |
Table Size Length L(mm) |
Cylinder Inner Diameter(Ø) |
Rodless Cylinder Joint Type |
Usage Environment |
Table Surface Treatment |
Guide |
Table Size Width W(mm) |
Table Size Height H(mm) |
Operating Pressure(MPa) |
Table Parallelism(µm) |
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Brand | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC |
Product Series | Mechanically Jointed Rodless Cylinder, Basic Type, MY1B-Z Series | MY1C, Mechanical Joint Rodless Cylinder, Cam Follower Guide w / o Stroke Adjustment | Mechanically Jointed Rodless Cylinder, Basic Type, MY1B Series | Mechanically Jointed Rodless Cylinder, Basic Type, MY3A / 3B Series | CY3R, Magnetically Coupled Rodless Cylinder (with Switch Rail) | Magnetically Coupled Rodless Cylinder, Slide Bearing, CY1S-Z Series | MY1M, Mechanical Joint Rodless Cylinder, Slide Bearing Type w / o Stroke Adjustment | Air Slide Table, Clean, Low Dust Generation 13 / 20 / 22-MXS Series | Mechanically Jointed Rodless Cylinder, Linear Guide Type MY1H Series | Mechanically Jointed Rodless Cylinder, Linear Guide Type, MY2H / HT Series | Sine Rodless Cylinder, Slider Type: Slide Bearing, REAS Series | Air Slide Table, Low Thrust with High Rigidity Type, MXQ*B Series | Mechanically Jointed Rodless Cylinder, Linear Guide Type, MY1H-Z Series | MY2C, Mechanical Joint Rodless Cylinder, Cam Follower Guide, w / o Stroke Adjustment Unit | Mechanically Jointed Rodless Cylinder With Protective Cover, MY1□W Series | CY1F, Magnetically Coupled Rodless Cylinder, Low Profile Guide | Magnet Type Rodless Cylinder, Basic Type Clean Series 12-CY3B Series | Magnet Type Rodless Cylinder, Direct Mount Type Clean Series 12-CY3R Series | Air Slide Table, Clean Series, 11-MXJ Copper / Fluorine Type Impossible Specification 20-MXJ | Air Slide Table, Clean and Low Dust Generation 13 / 20 / 22-MXQ Series | Mechanical joint type rodless cylinder linear guide type 55-MY1H series | ||||||||||||||||||||||||
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Starting from∗ | 280.69 € Special price *Unit price with basic configuration Promotional pricing | 221.89 € Special price *Unit price with basic configuration Promotional pricing | 402.35 € Special price *Unit price with basic configuration Promotional pricing | 12.40 € Special price *Unit price with basic configuration Promotional pricingVolume Discount | 10.60 € *Unit price with basic configuration | 747.16 € *Unit price with basic configuration | 279.53 € *Unit price with basic configuration | 10.48 € Special price *Unit price with basic configuration Promotional pricing | 8.08 € Special price *Unit price with basic configuration Promotional pricing | 37.39 € Special price *Unit price with basic configuration Promotional pricing | 237.31 € Special price *Unit price with basic configuration Promotional pricing | 345.00 € Special price *Unit price with basic configuration Promotional pricing | 29.10 € *Unit price with basic configuration | 807.56 € *Unit price with basic configuration | 152.58 € *Unit price with basic configuration | 372.60 € *Unit price with basic configuration | 27.90 € *Unit price with basic configuration | 338.74 € *Unit price with basic configuration | 225.77 € Special price *Unit price with basic configuration Promotional pricing | 317.77 € *Unit price with basic configuration | 297.97 € Special price *Unit price with basic configuration Promotional pricing | 16.65 € *Unit price with basic configuration | 11.19 € Special price *Unit price with basic configuration Promotional pricing | 508.69 € *Unit price with basic configuration | 24.48 € *Unit price with basic configuration | 279.53 € *Unit price with basic configuration | 17.21 € *Unit price with basic configuration | 296.00 € *Unit price with basic configuration | 11.19 € *Unit price with basic configuration | 18.81 € *Unit price with basic configuration | 321.79 € *Unit price with basic configuration | 126.94 € Special price *Unit price with basic configuration Promotional pricing | 351.05 € *Unit price with basic configuration | 648.74 € *Unit price with basic configuration | 221.71 € *Unit price with basic configuration | 1,225.27 € *Unit price with basic configuration | 963.29 € *Unit price with basic configuration | 402.35 € *Unit price with basic configuration | 262.29 € *Unit price with basic configuration | 307.18 € *Unit price with basic configuration | 248.15 € *Unit price with basic configuration | 606.03 € *Unit price with basic configuration | 1,110.84 € *Unit price with basic configuration | 269.02 € *Unit price with basic configuration | 433.89 € *Unit price with basic configuration |
Min. Shipping Days : | Same day | Same day | Same day | Same day | 4 Days | 4 Days | 4 Days | Same day | Same day | Same day | Same day | Same day | 26 Days | 4 Days | 4 Days | 26 Days | 4 Days | 26 Days | Same day | 4 Days | Same day | 4 Days | Same day | 4 Days | 26 Days | 4 Days | 4 Days | 4 Days | 4 Days | 26 Days | 4 Days | Same day | 4 Days | 26 Days | 4 Days | 26 Days | 4 Days | 7 Days | 26 Days | 9 Days | 26 Days | 26 Days | 26 Days | 4 Days | 4 Days |
Type | L-Style Table Type | L-Style Table Type | L-Style Table Type | Rodless Cylinder / Others | Rodless Cylinder / Others | Rodless Cylinder | L-Style Table Type | Rodless Cylinder / Others | Rodless Cylinder / Others | Rodless Cylinder | L-Style Table Type | Rodless Cylinder | L-Style Table Type / Others | Table Type | Rodless Cylinder | L-Style Table Type | Rodless Cylinder / Others | L-Style Table Type | L-Style Table Type | - | L-Style Table Type | Rodless Cylinder / Others | Rodless Cylinder / Others | Rodless Cylinder | Others | - | Rodless Cylinder / Others | Rodless Cylinder | Rodless Cylinder / Others | Others | L-Style Table Type | Rodless Cylinder / Others | Rodless Cylinder | Rodless Cylinder | Rodless Cylinder | Rodless Cylinder | Rodless Cylinder | L-Style Table Type | Rodless Cylinder | Rodless Cylinder | L-Style Table Type | L-Style Table Type | Rodless Cylinder | Table Type | Table Type |
Stroke(mm) | 10 ~ 200 | 5 ~ 60 | 10 ~ 150 | 1,000 ~ 3500 | 1,000 ~ 2400 | 1,000 ~ 3500 | 10 ~ 150 | 1,000 ~ 4200 | 1,000 ~ 2200 | 1,000 ~ 1920 | 5 ~ 20 | 1,000 ~ 1450 | 10 ~ 50 | 25 ~ 300 | 1,000 ~ 3800 | 10 ~ 150 | 1,000 ~ 2900 | 10 ~ 150 | 10 ~ 40 | 10 ~ 100 | 10 ~ 200 | 1,000 ~ 900 | 1,000 ~ 1320 | 1,000 ~ 1150 | - | 10 ~ 150 | 1,000 ~ 900 | 1,000 ~ 1600 | 1,000 ~ 1650 | - | 10 ~ 100 | 1,000 ~ 1850 | 1,000 ~ 1400 | 1,000 ~ 1600 | 50 ~ 800 | 100 ~ 700 | 1,000 ~ 3300 | 10 ~ 150 | 100 ~ 700 | 50 ~ 800 | 5 ~ 20 | 10 ~ 150 | 300 ~ 450 | 5 ~ 30 | 50 ~ 400 |
Table Material | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Stainless Steel | Aluminum | Stainless Steel | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | - | Aluminum | Aluminum | Aluminum | Aluminum | - | - | Aluminum | Aluminum | Aluminum | - | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Stainless Steel | Aluminum | Aluminum | Aluminum | Aluminum |
Max. Load Mass (Range Selectable)(kg) | 0.05 to 0.8 ~ 5 to 9.2 | - | 0.05 to 0.8 ~ 5 to 9.2 | 20 to 39.9 ~ 40 to 57 | 10 to 19 ~ 153 or More | 10 to 19 ~ 120 to 150.1 | 0.05 to 0.8 ~ 5 to 9.2 | 5 to 9.2 ~ 120 to 150.1 | 5 to 9.2 ~ 60 to 80 | 0.05 to 0.8 ~ 1 to 4.9 | 0.05 to 0.8 | 1 to 4.9 ~ 40 to 57 | 0.05 to 0.8 ~ 1 to 4.9 | 1 to 4.9 ~ 10 to 19 | 0.05 to 0.8 ~ 1 to 4.9 | 0.05 to 0.8 ~ 5 to 9.2 | 10 to 19 ~ 153 or More | 0.05 to 0.8 ~ 5 to 9.2 | - | - | 0.05 to 0.8 ~ 5 to 9.2 | 5 to 9.2 ~ 10 to 19 | 10 to 19 ~ 60 to 80 | 1 to 4.9 ~ 40 to 57 | - | - | 20 to 39.9 ~ 40 to 57 | 0.05 to 0.8 ~ 1 to 4.9 | 10 to 19 ~ 60 to 80 | - | 0.05 to 0.8 ~ 1 to 4.9 | 10 to 19 ~ 153 or More | 1 to 4.9 ~ 40 to 57 | 1 to 4.9 | 1 to 4.9 ~ 10 to 19 | 1 to 4.9 ~ 5 to 9.2 | 1 to 4.9 | 0.05 to 0.8 ~ 5 to 9.2 | 1 to 4.9 | 0.05 to 0.8 ~ 1 to 4.9 | 0.05 to 0.8 | 0.05 to 0.8 ~ 5 to 9.2 | 20 to 39.9 ~ 40 to 57 | 0.05 to 0.8 ~ 1 to 4.9 | 0.05 to 0.8 ~ 1 to 4.9 |
Table Size Length L(mm) | 42 ~ 306 | 42 ~ 114 | 42 ~ 283 | 110 ~ 170 | 65 ~ 220 | 80 ~ 230 | 54.5 ~ 339 | 50 ~ 400 | 65 ~ 220 | 34 ~ 118 | 42.5 ~ 54.5 | 40 ~ 95 | 63 ~ 98 | 84 ~ 209 | 35 ~ 122 | 59.5 ~ 339 | 80 ~ 230 | 55 ~ 343 | 42 ~ 79 | - | 42 ~ 306 | 50 ~ 100 | 70 ~ 158 | 45 ~ 95 | - | - | 114 ~ 170 | 38 ~ 90 | 70 ~ 158 | - | 54 ~ 211 | 110 ~ 290 | 40 ~ 136 | 53 ~ 76 | 38 ~ 89 | 67 ~ 90 | 70 ~ 122 | 41.5 ~ 281.5 | 57 ~ 92 | 38 ~ 76 | 42.5 ~ 54.5 | 63 ~ 323.5 | 114 ~ 170 | 21 ~ 56 | 32 ~ 52 |
Cylinder Inner Diameter(Ø) | 6 ~ 25 | 6 ~ 20 | 6 ~ 25 | 25 ~ 40 | 16 ~ 63 | 16 ~ 63 | 6 ~ 25 | 10 ~ 100 | 16 ~ 63 | 6 ~ 63 | 4.5 ~ 8 | 6 ~ 40 | 12 ~ 16 | 8 ~ 25 | 6 ~ 63 | 6 ~ 25 | 16 ~ 63 | 6 ~ 25 | 6 ~ 20 | 8 ~ 12 | 6 ~ 25 | 10 ~ 20 | 16 ~ 40 | 10 ~ 40 | - | 6 ~ 20 | 25 ~ 40 | 10 ~ 40 | 16 ~ 40 | - | 8 ~ 20 | 16 ~ 63 | 6 ~ 40 | 15 ~ 32 | 10 ~ 25 | 15 ~ 32 | 25 ~ 63 | 6 ~ 25 | 15 ~ 40 | 10 ~ 32 | 4 ~ 8 | 6 ~ 25 | 25 ~ 40 | 6 ~ 16 | 6 ~ 12 |
Rodless Cylinder Joint Type | - | - | - | Mechanical Joint Type | Mechanical Joint Type | Mechanical Joint Type | - | Mechanical Joint Type | Mechanical Joint Type | Magnet Type | - | Magnet Type | - | - | Magnet Type | Mechanical Joint Type | Mechanical Joint Type | - | - | - | - | Mechanical Joint Type | Mechanical Joint Type | Magnet Type | - | - | Mechanical Joint Type | Magnet Type | Mechanical Joint Type | - | - | Mechanical Joint Type | Magnet Type | Magnet Type | Magnet Type | Magnet Type | Magnet Type | Mechanical Joint Type | Magnet Type | Magnet Type | - | - | Mechanical Joint Type | - | - |
Usage Environment | General Purpose | General Purpose | General Purpose | General Purpose / Copper-Based / Fluorine-Based Material Not Used | General Purpose | General Purpose | General Purpose | General Purpose / Copper-Based / Fluorine-Based Material Not Used | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose / Heat Resistant | General Purpose | General Purpose | Dust Resistant / Copper-Based / Fluorine-Based Material Not Used / Cleanroom | General Purpose | - | General Purpose | General Purpose | General Purpose | General Purpose | - | - | General Purpose | General Purpose | General Purpose | - | General Purpose | General Purpose / Water Resistant / Dust Resistant | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | Dust Resistant / Copper-Based / Fluorine-Based Material Not Used | Dust Resistant / Copper-Based / Fluorine-Based Material Not Used / Cleanroom | General Purpose | General Purpose | General Purpose |
Table Surface Treatment | Clear Anodize | Clear Anodize | Nickel Plating | Clear Anodize | Clear Anodize | Nickel Plating | - | Clear Anodize | Nickel Plating | Clear Anodize | - | Not Provided | Heat treated | Clear Anodize | Clear Anodize | Not Provided | Clear Anodize | Clear Anodize | Clear Anodize | - | Clear Anodize | Clear Anodize | Clear Anodize | Clear Anodize | - | - | Clear Anodize | Clear Anodize | Clear Anodize | - | Clear Anodize | Clear Anodize | Clear Anodize | Clear Anodize | Clear Anodize | Nickel Plating | Not Provided | Heat treated | Clear Anodize | Clear Anodize | Heat treated | Nickel Plating | Clear Anodize | - | Nickel Plating |
Guide | Rolling Guide | Rolling Guide | Rolling Guide | Guideless | Slide Guide | Rolling Guide | Rolling Guide | Guideless | Guideless | Guideless | Rolling Guide | Slide Guide | Rolling Guide | Rolling Guide | Guideless | Rolling Guide | Slide Guide | Rolling Guide | Rolling Guide | - | Rolling Guide | Rolling Guide | Rolling Guide | Slide Guide | - | - | Rolling Guide | Guideless | Rolling Guide | - | Rolling Guide | Slide Guide / Rolling Guide | Rolling Guide | Guideless | Guideless | Guideless | Guideless | Rolling Guide | Guideless | Guideless | Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide |
Table Size Width W(mm) | 32 ~ 92 | 10 ~ 31 | 27 ~ 74 | 42 ~ 64 | 64 ~ 176 | 58 ~ 168 | 32 ~ 70 | 24 ~ 140 | 41 ~ 134 | 18.5 ~ 97 | 20 ~ 26 | 46 ~ 139 | 34 ~ 40 | 49 ~ 126 | 17 ~ 100 | 32 ~ 70 | 68 ~ 168 | 32 ~ 92 | 15 ~ 19 | - | 32 ~ 92 | 43 ~ 78 | 50.4 ~ 148.3 | 58 ~ 142 | - | - | 90 ~ 121 | 25.5 ~ 63.5 | 72.4 ~ 158 | - | 31 ~ 51.5 | 84 ~ 236 | 56 ~ 187 | 31.5 ~ 53.5 | 50.5 ~ 86 | 69 ~ 115 | 46 ~ 100 | 27 ~ 74 | 35 ~ 70 | 25.5 ~ 53.5 | 20 ~ 26 | 27 ~ 74 | 90 ~ 121 | 18 ~ 46 | 30 ~ 50 |
Table Size Height H(mm) | 20 ~ 62 | 39 ~ 64.5 | 20 ~ 55 | 54 ~ 84 | 33 ~ 93 | 40 ~ 130 | 23 ~ 52 | 27 ~ 190 | 27 ~ 84 | 19 ~ 97 | 9.5 ~ 12.5 | 27 ~ 76 | 18 ~ 23 | 30 ~ 76 | 17 ~ 100 | 23 ~ 52 | 40 ~ 130 | 20 ~ 62 | 39 ~ 47 | - | 20 ~ 62 | 27 ~ 46 | 28 ~ 58 | 34 ~ 76 | - | - | 54 ~ 84 | 26 ~ 67 | 28 ~ 58 | - | 16 ~ 27 | 52 ~ 149 | 25 ~ 78 | 32 ~ 55 | 28 ~ 46 | 45 ~ 75 | 46 ~ 100 | 20 ~ 55 | 35 ~ 70 | 26 ~ 55 | 10 ~ 13 | 20 ~ 55 | 54 ~ 84 | 17 ~ 32 | 21.5 ~ 36 |
Operating Pressure(MPa) | - | - | - | 0.1 to 0.8 | 0.15 to 0.7 ~ 0.2 to 0.7 | 0.1 to 0.8 ~ 0.15 to 0.8 | - | 0.1 to 0.8 ~ 0.2 to 0.8 | 0.15 to 0.8 ~ 0.2 to 0.8 | 0.12 to 0.7 ~ 0.16 to 0.7 | - | 0.18 to 0.7 | 0.1 to 0.7 | - | 0.12 to 0.7 ~ 0.16 to 0.7 | 0.15 to 0.6 ~ 0.3 to 0.7 | 0.15 to 0.8 ~ 0.2 to 0.8 | 0.15 to 0.7 | - | - | - | 0.15 to 0.8 ~ 0.2 to 0.8 | 0.1 to 0.8 ~ 0.15 to 0.8 | 0.18 to 0.7 | - | - | 0.1 to 0.8 | 0.18 to 0.7 | 0.1 to 0.8 ~ 0.15 to 0.8 | - | - | 0.1 to 0.8 ~ 0.2 to 0.8 | 0.18 to 0.7 | 0.18 to 0.7 | 0.2 to 0.7 | 0.05 to 0.3 | 0.18 to 0.7 | 0.15 to 0.7 | 0.12 to 0.7 ~ 0.16 to 0.7 | 0.14 to 0.7 ~ 0.16 to 0.7 | 0.15 to 0.7 | 0.15 to 0.7 | 0.1 to 0.8 | - | - |
Table Parallelism(µm) | - | 50 ~ 100 | 25 ~ 125 | - | - | - | - | - | - | - | 30 | - | 30 | - | - | - | 120 | - | 50 ~ 100 | - | - | - | - | - | - | - | - | - | 50 | - | - | - | - | - | 50 | - | - | 25 ~ 125 | - | - | 30 | 25 ~ 125 | - | 20 | - |
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